Semiconducting metal oxides (SMOs) based gas sensors are inherently hampered by requirement of high working temperature because of their wide bandgaps. Consequently, there are remain challenges to utilize SMOs based gas sensors with regard to continuous gas monitoring platform with low power consumption. To address the inherent limitation, nitridation (i.e., N doping) of WO₃ NFs to WO_xN_y NFs was herein introduced for realization of low-temperature NO₂ sensing. Importantly, nitridation was conducted at intervals of 50 °C from 400 to 600 °C to adjust the degree of phase transition from semiconducting WO₃ to conductive WON phases. To further optimize the conductivity and improve the sensing characteristics, i.e., reduction of optimal operating temperature and enhancement of sensitivity, WO_xN_y NFs were functionalized with platinum (Pt) catalytic nanoparticles (NPs) by physical mixing. Pt NPs functionalized WO_xN_y NFs nitrided at 550 °C exhibited improved normalized resistance change and superior selectivity against C₂H₅OH, C₇H₈, CH₄, CO, NH₃, and NO at 50 °C. The noble metal catalyst–metal oxynitride hybrid system is suggested as an effective NO₂ sensing platform for low-temperature chemical sensor.

基于半导体金属氧化物（SMO）的气体传感器因其带隙宽而固有地受到高工作温度的要求。因此，就具有低功耗的连续气体监测平台而言，利用基于SMO的气体传感器仍然存在挑战。为了解决固有的局限性，本文引入了将WO ₃ NF氮化为WO _x N _y NF的方法（即N掺杂），以实现低温NO ₂感测。重要的是，氮化的间隔为50°C，从400°C到600°C，以调节半导体WO ₃的相变程度到导电的WON相。为了进一步优化电导率并改善感测特性，即降低最佳工作温度并提高灵敏度，WO _x N _y NFs通过物理混合用铂（Pt）催化纳米颗粒（NPs）功能化。在550°C下氮化的Pt NPs功能化的WO _x N _y NFs在50°C下表现出改进的归一化电阻变化和对C ₂ H ₅ OH，C ₇ H ₈，CH ₄，CO，NH ₃和NO的优异选择性。建议将贵金属催化剂与金属氧氮化物混合系统作为有效的NO ₂ 低温化学传感器的传感平台。