Nanostructural Analysis of Porous Oblique Angle Deposited (OAD) Multilayer Systems by Grazing‐Incidence Small‐Angle X‐Ray Scattering,Advanced Materials Interfaces

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Nanostructural Analysis of Porous Oblique Angle Deposited (OAD) Multilayer Systems by Grazing‐Incidence Small‐Angle X‐Ray Scattering
Advanced Materials Interfaces ( IF 4.3 ) Pub Date : 2018-06-20 , DOI: 10.1002/admi.201800530
Manuel Oliva-Ramírez ₁ , Carmen López-Santos ₁ , Francisco Yubero ₁ , Agustín R. González-Elipe ₁

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This work reports a thorough characterization analysis of various porous thin film multilayers by means of grazing‐incidence small‐angle X‐ray scattering (GISAXS). Alternated TiO₂/SiO₂ nanocolumnar layers deposited at oblique angles are fabricated in slanted, chiral, and zig‐zag configurations by rotating azimuthally the substrate from one layer to the next. Multilayer systems formed by the stacking of 3 and 15 alternant thin films of these two oxides are morphologically characterized by scanning electron microscopy (SEM) and structurally by GISAXS. This technique has provided a means to determine various vertical and lateral correlation lengths and to assess the anisotropic electron density distribution along the structural elements existing in the multilayers. This information can be systematically used to account for the actual arrangement of nanostructural elements in multilayer systems.

中文翻译：

掠入射小角度X射线散射对多孔斜角沉积（OAD）多层系统的纳米结构分析

这项工作报告了通过掠入射小角X射线散射（GISAXS）对各种多孔薄膜多层膜进行的全面表征分析。交替TiO ₂ / SiO ₂通过倾斜将基体从一层移到下一层，以倾斜，手性和之字形配置制造以倾斜角度沉积的纳米柱状层。由这两种氧化物的3和15个交替的薄膜堆叠而成的多层系统在形态学上通过扫描电子显微镜（SEM）表征，在结构上通过GISAXS表征。该技术提供了确定各种垂直和横向相关长度并评估沿着多层中存在的结构元件的各向异性电子密度分布的手段。该信息可以系统地用于解释多层系统中纳米结构元素的实际排列。

更新日期：2018-06-20

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