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Highly sensitive integrated flexible tactile sensors with piezoresistive Ge 2 Sb 2 Te 5 thin films
npj Flexible Electronics ( IF 12.3 ) Pub Date : 2018-06-15 , DOI: 10.1038/s41528-018-0030-4
Zhiguang Wang , Cunzheng Dong , Xinjun Wang , Menghui Li , Tianxiang Nan , Xianfeng Liang , Huaihao Chen , Yuyi Wei , Haomiao Zhou , Mohsen Zaeimbashi , Syd Cash , Nian-Xiang Sun

Flexible tactile sensor has been extensively investigated as a key component for emerging electronics applications such as robotics, wearable devices, computer hardware, and security systems. Tactile sensors based on various one-dimensional materials have been widely explored. However, precise control of the direction and distribution of these nanomaterials remains a great challenge, and it has been difficult to scale down the device. Here, we introduce highly sensitive integrated flexible tactile sensors based on uniform phase-change Ge2Sb2Te5 (GST) thin films that can scale device size down, at least, to micrometer range. Significant piezoresistive effect has been observed in GST-based sensors, showing a giant gauge factor of 338. A proof of concept 5 × 5 sensor array functioning as a touch panel has been demonstrated. Also, the flexible GST tactile sensor has been utilized for monitoring of radial artery pulse. In addition to the well-known tunable electrical and optical properties, the piezoresistive GST films provide a versatile platform for the integration of sensing, recording, and displaying functions.



中文翻译:

具有压阻Ge 2 Sb 2 Te 5薄膜的高灵敏集成柔性触觉传感器

柔性触觉传感器已被广泛研究为新兴电子应用(例如机器人,可穿戴设备,计算机硬件和安全系统)的关键组件。已经广泛地探索了基于各种一维材料的触觉传感器。然而,精确控制这些纳米材料的方向和分布仍然是一个巨大的挑战,并且很难缩小器件的尺寸。在这里,我们介绍基于均匀相变Ge 2 Sb 2 Te 5的高灵敏集成柔性触觉传感器(GST)薄膜可以将器件尺寸缩小至至少微米级。在基于GST的传感器中观察到了显着的压阻效应,显示出338的巨大规格系数。已经证明了5×5传感器阵列可作为触摸面板的概念证明。而且,柔性GST触觉传感器已用于监测radial动脉脉搏。除了众所周知的可调电和光学特性,压阻GST膜还提供了集成感测,记录和显示功能的多功能平台。

更新日期:2018-06-15
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