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Acute and chronic toxicity of metal oxide nanoparticles in chemical mechanical planarization slurries with Daphnia magna
Environmental Science: Nano ( IF 5.8 ) Pub Date : 2018-06-02 , DOI: 10.1039/c7en01079f
Sarah Karimi 1, 2, 3, 4 , Meiline Troeung 2, 3, 4, 5 , Ruhung Wang 1, 2, 3, 4, 5 , Rockford Draper 1, 2, 3, 4, 5 , Paul Pantano 1, 2, 3, 4
Affiliation  

This work reports the first toxicity assessment with Daphnia magna of model chemical mechanical planarization (CMP) slurries containing specialized nanoparticles used in CMP slurry formulations.



中文翻译:

大型溞化学机械平坦化浆料中金属氧化物纳米粒子的急性和慢性毒性

这项工作报告了首次毒性评估大型溞化学机械平坦化 (CMP) 浆料模型,其中含有 CMP 浆料配方中使用的专用纳米粒子。

更新日期:2018-06-02
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