This paper presents an economic way to implement a high-precision (micrometer level) XY stage motion control for the industrial microscope using dc motors. Other than the prevailing design of using stepper motors where the stage is always locked under the motorized mode, the proposed design allows users to manually move the stage by introducing the friction engagement in between. The nonlinearity from the friction is then fully compensated by the sliding mode control so that the stage can strictly follow the predefined motion profile. Possible chattering suppression methods are discussed and the accuracy loss is analyzed using the LuGre friction model. A fine-tuning algorithm is then proposed to limit the position error within ±2 μm. Compared to the other micrometer-level industrial microscopes using stepper motors, the proposed solution achieves comparable performance with much lower costs.

中文翻译：

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工业显微镜高精度XY平台运动控制


本文提出了一种使用直流电机对工业显微镜实现高精度（微米级）XY 平台运动控制的经济方法。与使用步进电机的主流设计（其中载物台始终在电动模式下锁定）不同，所提出的设计允许用户通过在两者之间引入摩擦接合来手动移动载物台。然后，通过滑模控制完全补偿摩擦引起的非线性，以便平台可以严格遵循预定义的运动轨迹。讨论了可能的颤振抑制方法，并使用 LuGre 摩擦模型分析了精度损失。然后提出了一种微调算法，将位置误差限制在±2μm之内。与其他使用步进电机的微米级工业显微镜相比，所提出的解决方案以低得多的成本实现了可比的性能。