This paper presents an economic way to implement a high-precision (micrometer level) XY stage motion control for the industrial microscope using dc motors. Other than the prevailing design of using stepper motors where the stage is always locked under the motorized mode, the proposed design allows users to manually move the stage by introducing the friction engagement in between. The nonlinearity from the friction is then fully compensated by the sliding mode control so that the stage can strictly follow the predefined motion profile. Possible chattering suppression methods are discussed and the accuracy loss is analyzed using the LuGre friction model. A fine-tuning algorithm is then proposed to limit the position error within $\pm$ 2 $\mu$m. Compared to the other micrometer-level industrial microscopes using stepper motors, the proposed solution achieves comparable performance with much lower costs.

中文翻译：

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工业显微镜高精度XY平台运动控制

本文提出了一种经济的方法来实现使用直流电机的工业显微镜的高精度（微米级）XY 平台运动控制。除了使用步进电机的流行设计，在电动模式下，平台始终锁定，建议的设计允许用户通过在两者之间引入摩擦接合来手动移动平台。然后通过滑模控制完全补偿摩擦的非线性，以便平台可以严格遵循预定义的运动曲线。讨论了可能的抖动抑制方法，并使用 LuGre 摩擦模型分析了精度损失。然后提出了一种微调算法以将位置误差限制在$\下午$ 2 $\mu$米。与使用步进电机的其他微米级工业显微镜相比，所提出的解决方案以更低的成本实现了可比的性能。