Biosensors play important roles in different applications such as medical diagnostics, environmental monitoring, food safety, and the study of biomolecular interactions. Highly sensitive, label-free and disposable biosensors are particularly desired for many clinical applications. In the past decade, film bulk acoustic resonators (FBARs) have been developed as biosensors because of their high resonant frequency and small base mass (hence greater sensitivity), lower cost, label-free capability and small size. This paper reviews the piezoelectric materials used for FBARs, the optimisation of device structures, and their applications as biosensors in a wide range of biological applications such as the detection of antigens, DNAs and small biomolecules. Their integration with microfluidic devices and high-throughput detection are also discussed.

生物传感器在医学诊断，环境监测，食品安全以及生物分子相互作用的研究等不同应用中发挥着重要作用。对于许多临床应用而言，特别需要高度灵敏，无标签的一次性生物传感器。在过去的十年中，膜体声波谐振器（FBAR）由于其高的谐振频率和小的基本质量（因此具有更高的灵敏度），较低的成本，无标签的功能和小尺寸而被开发为生物传感器。本文概述了用于FBAR的压电材料，设备结构的优化及其在生物检测（例如检测抗原，DNA和小生物分子）中作为生物传感器的应用。还讨论了它们与微流体设备的集成以及高通量检测。