Femtosecond‐Laser Direct Writing of Metallic Micro/Nanostructures: From Fabrication Strategies to Future Applications,Small Methods

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Femtosecond‐Laser Direct Writing of Metallic Micro/Nanostructures: From Fabrication Strategies to Future Applications
Small Methods ( IF 10.7 ) Pub Date : 2018-05-07 , DOI: 10.1002/smtd.201700413
Zhuo-Chen Ma ₁ , Yong-Lai Zhang ₁ , Bing Han ₁ , Qi-Dai Chen ₁ , Hong-Bo Sun ₂

Affiliation

The past decade has seen growing research interest in developing novel fabrication methodologies for metallic micro/nanostructures toward the rational design and integration of 0D to 3D metallic configurations. Among the various fabrication techniques, femtosecond‐laser direct writing has emerged as a prominent approach to reach this goal and greatly facilitates the development of metallic micro/nanostructure‐enabled applications. Here, a series of femtosecond‐laser‐mediated fabrication strategies, including the two‐photon reduction of metal ions, template‐assisted metal coating and metal filling, photodynamic assembly of metal nanoparticles, and selective nanoparticle sintering, are summarized. Additionally, abundant applications in microelectronics, metamaterials, near‐field optics, microfluidics, micromechanics, and microsensors are introduced in detail. Current challenges and future perspectives in this field are also discussed.

中文翻译：

飞秒激光直接写入金属微/纳米结构：从制造策略到未来应用

在过去的十年中，越来越多的研究兴趣转向为金属微/纳米结构开发新颖的制造方法，以实现合理的设计以及0D到3D金属配置的集成。在各种制造技术中，飞秒激光直接写入已成为实现此目标的一种突出方法，极大地促进了金属微纳米结构应用的开发。在此，总结了一系列飞秒激光介导的制造策略，包括金属离子的双光子还原，模板辅助金属涂层和金属填充，金属纳米粒子的光动力组装以及选择性纳米粒子烧结。此外，在微电子，超材料，近场光学，微流体，微力学，并详细介绍了微传感器。还讨论了该领域的当前挑战和未来前景。

更新日期：2018-05-07

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