AbstractBlock copolymer (BCP) lithography, as one of the most promising techniques for the next-generation integrated circuits, has been extensively investigated in recent years. Among the diverse types of BCPs, liquid-crystalline BCPs (LC-BCPs) formed by incorporating LC moieties into the BCPs have become increasingly attractive because of the tunable alignment of the LC chains. This review highlights the control of the microdomain orientation of PEO-b-PMA(Az) thin films via novel and convenient processing methods, including micropore extrusion and the introduction of polydimethylsiloxane (PDMS). Meanwhile, the mechanisms of the microdomain alignment transition are clarified and are closely related to the soft shearing field and the change in the block surface energy. Furthermore, some new perspectives for future research on the self-assembly of LC-BCP thin films are outlined from the point of view of material design, orientation control, and technological innovation.The facile control of the microdomain orientation in the liquid-crystalline block copolymer (LC-BCP) thin films has been realized by means of micropore extrusion and introducing polydimethylsiloxane (PDMS), instead of complicated processes or costly apparatus. In extrusion process, the alignment can be recovered via ultrasonicating the extruded BCP solution or as-placing upon long-time thermal annealing.

中文翻译：

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薄膜中液晶嵌段共聚物的自组装：微畴取向的控制

摘要 嵌段共聚物（BCP）光刻作为下一代集成电路最有前途的技术之一，近年来得到了广泛的研究。在各种类型的 BCP 中，由于 LC 链的可调排列，通过将 LC 部分结合到 BCP 中形成的液晶 BCP（LC-BCP）变得越来越有吸引力。这篇综述强调了通过新颖和方便的加工方法控制 PEO-b-PMA(Az) 薄膜的微畴取向，包括微孔挤出和聚二甲基硅氧烷 (PDMS) 的引入。同时，阐明了微畴排列转变的机制，并与软剪切场和块表面能的变化密切相关。此外，从材料设计、取向控制和技术创新的角度概述了未来LC-BCP薄膜自组装研究的一些新观点。液晶嵌段共聚物中微畴取向的简便控制（ LC-BCP) 薄膜是通过微孔挤出和引入聚二甲基硅氧烷 (PDMS) 实现的，而不是复杂的工艺或昂贵的设备。在挤出过程中，可以通过对挤出的 BCP 溶液进行超声处理或长时间热退火来恢复对齐。通过微孔挤出和引入聚二甲基硅氧烷（PDMS），而不是复杂的工艺或昂贵的设备，可以轻松控制液晶嵌段共聚物（LC-BCP）薄膜中的微畴取向。在挤出过程中，可以通过对挤出的 BCP 溶液进行超声处理或在长时间热退火后放置来恢复对齐。通过微孔挤出和引入聚二甲基硅氧烷（PDMS），而不是复杂的工艺或昂贵的设备，可以轻松控制液晶嵌段共聚物（LC-BCP）薄膜中的微畴取向。在挤出过程中，可以通过对挤出的 BCP 溶液进行超声处理或在长时间热退火后放置来恢复对齐。