Planar micro-supercapacitors are recognized as one of the most competitive on-chip power sources for integrated electronics. However, most reported symmetric micro-supercapacitors suffer from low energy density. Herein, we demonstrate the facile mask-assisted fabrication of new-type all-solid-state planar hybrid micro-supercapacitors with high energy density, based on interdigital patterned films of porous vanadium nitride nanosheets as negative electrode and Co(OH)₂ nanoflowers as positive electrode. The resultant planar hybrid micro-supercapacitors display high areal capacitance of 21 mF cm⁻² and volumetric capacitance of 39.7 F cm⁻³ at 0.2 mA cm⁻², and exhibit remarkable energy density of 12.4 mWh cm⁻³ and power density of 1750 mW cm⁻³, based on the whole device, outperforming most reported planar hybrid micro-supercapacitors and planar asymmetric micro-supercapacitors. Moreover, all-solid-state planar hybrid micro-supercapacitors show excellent cyclability with 84% capacitance retention after 10000 cycles, and exceptionally mechanical flexibility. Therefore, our proposed strategy for the simplified construction of planar hybrid micro-supercapacitors will offer numerous opportunities of utilizing graphene and other 2D nanosheets for high-energy microscale supercapacitors for electronics.

平面微型超级电容器被公认为是集成电子产品中最具竞争力的片上电源之一。然而，大多数报道的对称微型超级电容器具有低能量密度。在本文中，我们基于多孔氮化钒纳米片作为负极和Co（OH）₂纳米花作为叉指图案化膜，展示了具有高能量密度的新型全固态平面混合微型超级电容器的简易掩模辅助制造。正极。所得的平面混合微型超级电容器在0.2 mA cm ^-2时显示21 mF cm ^-2的高面积电容和39.7 F cm ^-3的体积电容，并显示出12.4 mWh cm ^-3的显着能量密度。和基于整个器件的功率密度为1750 mW cm ^-3，其性能优于大多数报道的平面混合微型超级电容器和平面非对称微型超级电容器。此外，全固态平面混合微型超级电容器具有出色的可循环性，在10000次循环后具有84％的电容保持率，并具有出色的机械柔韧性。因此，我们提出的简化平面混合微型超级电容器结构的策略将为利用石墨烯和其他2D纳米片材制造电子高能微型超级电容器提供许多机会。