Optical microresonators are essential to a broad range of technologies and scientific disciplines. However, many of their applications rely on discrete devices to attain challenging combinations of ultra-low-loss performance (ultrahigh Q) and resonator design requirements. This prevents access to scalable fabrication methods for photonic integration and lithographic feature control. Indeed, finding a microfabrication bridge that connects ultrahigh-Q device functions with photonic circuits is a priority of the microcavity field. Here, an integrated resonator having a record Q factor over 200 million is presented. Its ultra-low-loss and flexible cavity design brings performance to integrated systems that has been the exclusive domain of discrete silica and crystalline microcavity devices. Two distinctly different devices are demonstrated: soliton sources with electronic repetition rates and high-coherence/low-threshold Brillouin lasers. This multi-device capability and performance from a single integrated cavity platform represents a critical advance for future photonic circuits and systems.

光学微谐振器对于广泛的技术和科学学科至关重要。但是，它们的许多应用都依靠分立器件来实现超低损耗性能（超高Q）和谐振器设计要求的具有挑战性的组合。这阻止了用于光子集成和光刻特征控制的可扩展制造方法的访问。实际上，找到将超高Q器件功能与光子电路连接起来的微制造桥是微腔领域的优先事项。此处，具有记录Q的集成谐振器提出了超过2亿的系数。其超低损耗和灵活的腔体设计为集成系统带来了性能，该系统已成为离散二氧化硅和晶体微腔器件的专有领域。演示了两种截然不同的设备：具有电子重复率的孤子源和高相干/低阈值布里渊激光器。来自单个集成腔平台的多设备功能和性能代表了未来光子电路和系统的关键进展。