Abstract Titanium/silicon-carbide-fibre composites offer an excellent combination of weight-specific properties that make them ideal for many components in aeroengines. However, potential industrial applications are hampered by the need to fabricate semi-circular micro-grooves on the titanium alloy foils. Through-mask electrochemical micromachining (EMM) has been developed to fabricate micro-grooves on the surface of titanium alloy. The distribution of current density affects the micro-groove profile, and different mask aspect ratios can form different distributions of current density in through-mask EMM. Therefore, micro-grooves with semi-circular profiles can be fabricated by controlling the aspect ratio of the mask groove. In this paper, the effect of mask aspect ratio on the micro-groove profile during through-mask EMM is investigated by electric field simulation. From simulation results obtained in a series of experiments, the appropriate mask aspect ratio is found for fabricating semi-circular micro-grooves. Ultimately, a group of micro-grooves is fabricated successfully with the required accuracy by through-mask EMM.

中文翻译：

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穿掩模电化学微加工在钛合金表面制备半圆形微槽

摘要 钛/碳化硅纤维复合材料提供了重量特定特性​​的完美组合，使其成为航空发动机中许多部件的理想选择。然而，由于需要在钛合金箔上制造半圆形微槽，阻碍了潜在的工业应用。已经开发了通过掩模电化学微加工（EMM）在钛合金表面制造微槽。电流密度的分布会影响微槽轮廓，不同的掩膜纵横比可以在穿透掩膜 EMM 中形成不同的电流密度分布。因此，可以通过控制掩模凹槽的纵横比来制造具有半圆形轮廓的微凹槽。在本文中，通过电场模拟研究了掩模纵横比对贯穿掩模 EMM 过程中微槽轮廓的影响。从一系列实验中获得的模拟结果，找到了制造半圆形微槽的合适掩模纵横比。最终，通过掩模 EMM 以所需的精度成功制造了一组微槽。