Abstract PDMS (Polydimethylsiloxane) thin films are widely used in stretchable electronics. However, it still remains challenging to fabricate PDMS thin films in an easy and convenient manner. To address this issue, here we novelly present an approach to ease the fabrication of PDMS membranes using lift-off method. For application as substrates in flexible biosensors, a gold thin film has been deposited on the PDMS thin film. The reliability of electric conductivity has been investigated. Moreover, biocompatibility of the PDMS thin film has been tested by culturing HeLa live cells it. The results demonstrate that the PDMS thin films fabricated by lift-off method has a high prospect towards application as substrate in flexible biosensors.

中文翻译：

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一种新的 PDMS 薄膜生产方法，可用作柔性生物传感器的基板

摘要 PDMS（聚二甲基硅氧烷）薄膜广泛应用于可拉伸电子产品。然而，以简单方便的方式制造 PDMS 薄膜仍然具有挑战性。为了解决这个问题，我们在这里新颖地提出了一种使用剥离方法简化 PDMS 膜制造的方法。为了作为柔性生物传感器的基板应用，金薄膜已沉积在 PDMS 薄膜上。已经研究了电导率的可靠性。此外，PDMS 薄膜的生物相容性已通过培养 HeLa 活细胞进行了测试。结果表明，通过剥离法制备的 PDMS 薄膜作为柔性生物传感器的基板具有很高的应用前景。