Abstract Novel aluminum and indium doped zinc oxide (ZnO) bilayer transparent conducting oxide thin films was fabricated by simple sol-gel spin coating method and post-annealed at 500 °C for an hour under nitrogen ambient for solar cell applications. The structural, electrical and optical properties of both the as-deposited and annealed bilayer thin films were characterized. X-ray diffraction studies show a hexagonal wurtzite-type structure of ZnO with (0 0 2) orientation, which enhanced with annealing. In atomic force microscopy studies, minimum surface roughness was attained for Al-doped ZnO (AZO)/In-doped ZnO (IZO) bilayer TCO film compared to IZO/AZO bilayer film. The AZO/IZO film sheet resistance improved to 0.057 M ohm/square after post-annealing, while the single layer AZO film sheet resistance degraded upon annealing in nitrogen atmosphere. All the films had an average transmittance in the visible region over 96%.

中文翻译：

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用于太阳能电池应用的铝掺杂氧化锌和掺杂氧化锌双层透明导电氧化物的性能

摘要 通过简单的溶胶-凝胶旋涂法制备了新型铝和铟掺杂氧化锌（ZnO）双层透明导电氧化物薄膜，并在氮气环境下在 500 °C 下退火 1 小时，用于太阳能电池应用。表征了沉积和退火双层薄膜的结构、电学和光学特性。X 射线衍射研究显示具有 (0 0 2) 取向的六方纤锌矿型 ZnO 结构，其随着退火而增强。在原子力显微镜研究中，与 IZO/AZO 双层膜相比，Al 掺杂的 ZnO (AZO)/In 掺杂的 ZnO (IZO) 双层 TCO 膜获得了最小的表面粗糙度。后退火后，AZO/IZO 薄膜的薄层电阻提高到 0.057 M ohm/square，而单层 AZO 薄膜的薄层电阻在氮气氛中退火后下降。