(M = Fe, Cr and Co) doped CaZrO₃, CaZr_0.7M_0.3O₃ (M = Fe, Cr and Co), was synthesized by solid state reaction method. Crystalline structure, microstructures, electronic conductivity, total conductivity and sensing performance were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), Hebb-Wagner, DC van der Pauw and voltammetry method, respectively. XRD measurements show that the CaZr_0.7M_0.3O₃ (M = Fe, Cr and Co) samples belong to an orthorhombic perovskite structure. SEM measurements show that the CaZr_0.7M_0.3O₃ (M = Fe, Cr and Co) samples have fine grains with average grain size of 0.5–2 μm. Electrical property measurements show that the CaZr_0.7Fe_0.3O₃ and CaZr_0.7Cr_0.3O₃ samples have the highest electronic conductivity and total conductivity in air, respectively. Sensing performance measurements show that limiting current-type oxygen sensors with 9YSZ solid electrolyte and CaZr_0.7M_0.3O₃ dense diffusion barrier exhibit good limiting current (I_L) plateau. Log I_L depends linearly on 1000/T. I_L depends linearly on oxygen partial pressure.

（M ＝ Fe，Cr和Co）掺杂的CaZrO ₃，通过固相反应法合成了CaZr _0.7 M _0.3 O ₃（M ＝ Fe，Cr和Co）。分别通过X射线衍射（XRD），扫描电子显微镜（SEM），Hebb-Wagner，DC van der Pauw和伏安法对晶体结构，微观结构，电导率，总电导率和感测性能进行了表征。XRD测量表明，CaZr _0.7 M _0.3 O ₃（M = Fe，Cr和Co）样品属于正交晶钙钛矿结构。扫描电镜测量表明CaZr _0.7 M _0.3 O ₃（M = Fe，Cr和Co）样品具有细晶粒，平均晶粒尺寸为0.5–2μm。电性能测量表明，CaZr _0.7 Fe _0.3 O ₃和CaZr _0.7 Cr _0.3 O ₃样品分别在空气中具有最高的电子电导率和总电导率。感测性能的测量表明，与9YSZ固体电解质和CaZr极限电流型氧传感器_0.7中号_0.3 ö ₃密扩散阻挡显示了良好的极限电流（我_大号）高原。日志我_大号线性依赖于1000 / Ť。一世_L线性地取决于氧分压。