Hygroscopic film that has a super mesoporous structure exhibits high sensitivity and fast response/recovery in humidity sensing applications. Aerosol deposition (AD) via a shock-loading-solidification preparation mechanism, which is an unexplored potential hygroscopic film preparation technique, can produce a porous microstructure, and the AD hammering effect creates various interior and surface microstructures in different-thickness films. The objective of our study was to verify the feasibility of using AD as a humidity-sensing film preparation technique, and to investigate the thickness effects of the film on its microstructure and hygroscopic properties. Hygroscopic films with thicknesses ranging from 0.1–10.0 μm were aerosol deposited with BaTiO₃ powders before undergoing a 400 °C thermal treatment. The resulting surface morphology exhibited roughness increases for thicknesses from 0.1–6.0 μm, and a decrease at 10.0 μm. The cross-sectional structure was characterized by a transitional-density grain distribution in which higher density small-sized grains could be seen in the bottom layer. Films with thicknesses of 1.5 μm and 3.0 μm achieved excellent sensitivities of 178.6 ± 7.3 pF/%RH and 299.9 ± 5.4 pF/%RH, respectively. Further, the response and recovery time for the 1.5 μm film were both less than 5 s. The current study determined the feasibility of AD-based humidity-sensing film preparation and provided a reference for optimal thickness control. The surface hydrophilicity, pore volume, and open-pore ratio were analyzed as critical factors of the thickness related humidity sensing effects, and physical modeling indicated that AD-prepared films exhibited an expanded humidity detection range, enhanced water vapor adsorption and desorption, and improved sensitivity to humidity.

具有超中孔结构的吸湿膜在湿度传感应用中表现出高灵敏度和快速响应/恢复。通过冲击加载-固化制备机制的气溶胶沉积（AD）是一种尚未开发的潜在吸湿膜制备技术，可以产生多孔微结构，并且AD锤击作用会在不同厚度的膜中产生各种内部和表面微结构。我们的研究目的是验证将AD用作湿度感应膜制备技术的可行性，并研究膜的厚度对膜的微观结构和吸湿性能的影响。BaTiO ₃气溶胶沉积厚度为0.1–10.0μm的吸湿膜粉末在经过400°C热处理之前。最终的表面形态显示出，厚度从0.1-6.0μm时，粗糙度增加，而在10.0μm时，粗糙度降低。横截面结构的特征在于过渡密度的晶粒分布，其中可以在底层看到更高密度的小尺寸晶粒。厚度为1.5μm和3.0μm的薄膜分别具有出色的灵敏度，分别为178.6±7.3 pF /％RH和299.9±5.4 pF /％RH。此外，1.5μm薄膜的响应时间和恢复时间均小于5 s。目前的研究确定了基于AD的湿敏膜制备的可行性，并为最佳的厚度控制提供了参考。表面亲水性，孔容，