Mechanisms of Directed Self-Assembly in Cylindrical Hole Confinements,Macromolecules

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Mechanisms of Directed Self-Assembly in Cylindrical Hole Confinements
Macromolecules ( IF 5.1 ) Pub Date : 2018-03-16 00:00:00 , DOI: 10.1021/acs.macromol.7b02639
Cody T. Bezik ₁ , Grant P. Garner ₁ , Juan J. de Pablo _{1,

2}

Affiliation

The directed self-assembly of block copolymers in cylindrical holes is a promising technology for lithographic patterning, particularly in the context of vertical interconnect accesses. While the hole-shrink process for single cylinders has been extensively explored, the proliferation of morphological defects remains a significant technological barrier. We use a coarse-grained model to explore morphologies that form within cylindrical confinements for combinations of template surface energies. We identify metastable defect morphologies, in addition to the desired cylindrical morphology, in majority-wetting sidewall templates. We use our coarse-grained model and the string method to identify transition pathways between defective morphologies and the cylindrical morphology to elucidate the mechanism of defect annihilation within the confinements; the transition pathway from a disordered state is also identified. This work demonstrates that the minimum free energy path for the formation of a cylinder goes through defective morphologies and that designing confinements can eliminate these undesirable transition states.

中文翻译：

圆柱孔约束中定向自组装的机理

在圆柱孔中嵌段共聚物的定向自组装是用于光刻图案化的有前途的技术，特别是在垂直互连通路的情况下。尽管已经对单缸的缩孔工艺进行了广泛的探索，但是形态缺陷的扩散仍然是重要的技术障碍。我们使用粗粒度模型来探索在圆柱约束内形成的模板表面能组合的形貌。我们在大多数润湿的侧壁模板中，除了所需的圆柱形态外，还确定了亚稳态缺陷形态。我们使用粗粒度模型和字符串方法来确定缺陷形态和圆柱形态之间的过渡路径，以阐明限制范围内的缺陷an灭的机制。还确定了从无序状态的过渡途径。这项工作表明，形成圆柱体的最小自由能路径经历了有缺陷的形态，并且设计约束可以消除这些不良的过渡态。

更新日期：2018-03-16

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