Abstract The promise of carbon nanotube (CNT)-based technology has driven colossal research efforts for the past three decades. Integration of CNTs onto functional devices often involves the use of time-consuming and laborious patterning techniques to obtain spatially selective growth. In this manuscript, we present a single-step route for CNT forest growth in patterned areas using a novel catalyst support activation process which does not require the use of masks, resists or stencils. The process uses an electron-beam (e-beam) in the presence of water vapor to activate a catalyst support at select locations, on which CNT forests can grow selectively when exposed to the CNT catalyst and precursor. The process, therefore referred to as e-beam chemistry, modifies the support stoichiometry and surface roughness using a radiolysis-driven mechanism to yield catalytically active patterns on an otherwise inactive catalyst support. Because of its simplicity and effectiveness, the presented technique holds great promise in producing high fidelity, chemically-selective patterns.

中文翻译：

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碳纳米管催化剂载体的水辅助电子束诱导活化，用于无掩模、无抗蚀剂图案化

摘要 基于碳纳米管 (CNT) 的技术的前景在过去的三年中推动了巨大的研究工作。将碳纳米管集成到功能器件上通常需要使用费时费力的图案化技术来获得空间选择性生长。在这份手稿中，我们使用一种不需要使用掩模、抗蚀剂或模板的新型催化剂载体活化过程，提出了在图案区域中 CNT 森林生长的单步路线。该过程使用电子束（e-beam）在水蒸气存在的情况下激活选定位置的催化剂载体，当暴露于 CNT 催化剂和前体时，CNT 森林可以在该位置选择性地生长。该过程因此被称为电子束化学，使用辐射驱动机制修改载体化学计量和表面粗糙度，以在其他非活性催化剂载体上产生催化活性图案。由于其简单性和有效性，所提出的技术在产生高保真、化学选择性图案方面具有很大的前景。