Abstract FeCoB films were deposited by composition gradient sputtering, and an ultrathin Ru spacer was inserted in the middle of the 50 nm FeCoB films. The static and high frequency magnetic properties of the FeCoB/Ru/FeCoB trilayer films were systematically studied. The films show a good in-plane uniaxial anisotropy, and the anisotropy field increased greatly from 85 Oe to 417 Oe, while the corresponding resonance frequency was dramatically enhanced from 4.23 GHz to 8.36 GHz. Furthermore, the trilayer films also show a low damping of 0.012. This study provides a simple and effective technique to further increase the resonance frequency of soft magnetic films by inserting an ultrathin nonmagnetic spacer, which can be applied to high frequency microwave devices.

中文翻译：

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调整成分梯度 FeCoB/Ru/FeCoB 三层薄膜的微波磁性能

摘要 采用成分梯度溅射法沉积 FeCoB 薄膜，并在 50 nm FeCoB 薄膜中间插入超薄 Ru 间隔物。系统地研究了 FeCoB/Ru/FeCoB 三层薄膜的静态和高频磁性能。薄膜显示出良好的面内单轴各向异性，各向异性场从 85 Oe 大幅增加到 417 Oe，而相应的共振频率从 4.23 GHz 显着提高到 8.36 GHz。此外，三层薄膜还表现出 0.012 的低阻尼。该研究提供了一种简单有效的技术，通过插入超薄非磁性垫片来进一步提高软磁薄膜的共振频率，可应用于高频微波器件。