The superior optical properties of metamaterials often rely on hierarchical structures in the sub‐wavelength regime comprising stacks of individually patterned layers. For the fabrication of metamaterials in the visible regime, specific top‐down lithographic methods have been developed. These techniques, however, have several inherent drawbacks such the lack of scalability and low production speeds. Here, a simple and modular approach for the construction of multilayer metal–insulator–metal structures based on the transfer of metal nanohole arrays via liquid interfaces is demonstrated. Gold nanohole arrays are used as model systems that are prepared via nanosphere lithography on a zinc oxide sacrificial layer. Exploiting an interface mediated method, the prepared nanohole arrays are subsequently transferred onto arbitrary hydrophilic or hydrophobic substrates without compromising the high quality of the nanomeshes. Two approaches to stack such nanostructured layers with nanometer precision in a rapid way are demonstrated. Finally, the high mechanical stability of only 100 nm thick gold nanohole arrays allows for the preparation of free‐standing nanomeshes in the order of several hundreds of square‐micrometers.

中文翻译：

---

液体界面处的纳米网格：从自由孔阵列到金属-绝缘体-金属结构

超材料的优异光学特性通常依赖于亚波长范围内的分层结构，该分层结构包括单独图案化的层的堆叠。为了在可见光状态下制造超材料，已经开发了特定的自上而下的光刻方法。但是，这些技术具有一些固有的缺点，例如缺乏可伸缩性和较低的生产速度。在此，展示了一种基于金属纳米孔阵列通过液体界面转移的构造多层金属-绝缘体-金属结构的简单模块化方法。金纳米孔阵列用作通过氧化锌牺牲层上的纳米球光刻制备的模型系统。利用界面介导的方法 随后将制备的纳米孔阵列转移到任意亲水性或疏水性基质上，而不会损害纳米网格的高质量。展示了两种以快速方式以纳米精度堆叠这种纳米结构层的方法。最后，只有100 nm厚的金纳米孔阵列具有很高的机械稳定性，可以制备成百上千平方微米量级的独立纳米筛网。