Abstract We report the effect of glancing angle deposition (GLAD) method on hydrophobicity properties of diamond like carbon (DLC) films. DLC films were manufactured using direct ion beam method by methane (CH4) precursor gas at different incident flux angles (α = 0°, 45°, 75°, and 85°). We indicated increment in water contact angle from 83.6° to 119.4° with increasing the deposition angle and porosity of films. The top and cross sectional field emission scanning electron microscope (FESEM) images of films indicated noticeable changes in structure and morphology of the prepared specimens as functions of incident angles.

中文翻译：

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使用掠射角沉积法修改类金刚石碳膜的疏水性

摘要 我们报告了掠射角沉积 (GLAD) 方法对类金刚石 (DLC) 薄膜疏水性的影响。DLC 薄膜是使用直接离子束法通过甲烷 (CH4) 前驱体气体在不同入射通量角 (α = 0°、45°、75° 和 85°) 下制造的。我们表明，随着沉积角和薄膜孔隙率的增加，水接触角从 83.6° 增加到 119.4°。薄膜的顶部和横截面场发射扫描电子显微镜 (FESEM) 图像表明，作为入射角的函数，所制备样品的结构和形态发生了显着变化。