Abstract Transparent conductive aluminum-doped zinc oxide (AZO) thin films were deposited on a flat and nanostructured borosilicate glass substrates by using DC-magnetron sputtering. The aluminum doping concentration was kept at 3.3 wt% and the film thickness (100–400 nm) was varied. The thin films were then annealed at 250 °C for 1 h in nitrogen and/or argon atmosphere, respectively. AZO thin films exhibited hexagonal wurtzite structure of ZnO with an intense (0 0 2) diffraction peak, indicating that they have c-axis preferred orientation. Optical transmittance was observed to be greater than 80% in the visible range for films deposited on both flat and nanostructured glass substrates. The lowest resistivity of 9.7 × 10−4 Ω cm was observed for AZO film of 400 nm thickness on flat glass substrate, annealed in Nitrogen atmosphere. The power conversion efficiency (PCE) of 0.27% and 2.24% were recorded for organic solar cell devices based on AZO deposited on nanostructured and flat borosilicate glass, respectively. In comparison with the latter, the PCE of ITO based device was recorded to be 3.17%. Due to their good optical and electrical properties, AZO thin films are promising candidates as transparent electrodes in organic solar cells.

中文翻译：

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沉积在平面和纳米结构玻璃基板上的铝掺杂 ZnO 薄膜：有机太阳能电池应用的质量和性能

摘要 使用直流磁控溅射在平坦的纳米结构硼硅酸盐玻璃基板上沉积透明导电铝掺杂氧化锌（AZO）薄膜。铝掺杂浓度保持在 3.3%，薄膜厚度（100-400 nm）是变化的。然后将薄膜分别在氮气和/或氩气气氛中在 250°C 下退火 1 小时。AZO薄膜表现出ZnO的六方纤锌矿结构，具有强烈的（0 0 2）衍射峰，表明它们具有c轴择优取向。对于沉积在平面和纳米结构玻璃基板上的薄膜，在可见光范围内观察到光学透射率大于 80%。对于在氮气气氛中退火的平板玻璃基板上 400 nm 厚的 AZO 膜，观察到最低电阻率为 9.7 × 10−4 Ω cm。基于 AZO 沉积在纳米结构和平面硼硅酸盐玻璃上的有机太阳能电池器件的功率转换效率 (PCE) 分别记录为 0.27% 和 2.24%。与后者相比，基于 ITO 的设备的 PCE 记录为 3.17%。由于其良好的光学和电学性能，AZO薄膜是有机太阳能电池中透明电极的有希望的候选者。