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Real-Time Gas Mixture Analysis Using Mid-Infrared Membrane Microcavities
Analytical Chemistry ( IF 6.7 ) Pub Date : 2018-03-06 00:00:00 , DOI: 10.1021/acs.analchem.7b03599 Tiening Jin , Junchao Zhou , Zelun Wang , Ricardo Gutierrez-Osuna , Charles Ahn 1 , Wonjun Hwang 1 , Ken Park 1 , Pao Tai Lin
Analytical Chemistry ( IF 6.7 ) Pub Date : 2018-03-06 00:00:00 , DOI: 10.1021/acs.analchem.7b03599 Tiening Jin , Junchao Zhou , Zelun Wang , Ricardo Gutierrez-Osuna , Charles Ahn 1 , Wonjun Hwang 1 , Ken Park 1 , Pao Tai Lin
Affiliation
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Real-time gas analysis on-a-chip was demonstrated using a mid-infrared (mid-IR) microcavity. Optical apertures for the microcavity were made of ultrathin silicate membranes embedded in a silicon chip using the complementary metal-oxide-semiconductor (CMOS) process. Fourier transform infrared spectroscopy (FTIR) shows that the silicate membrane is transparent in the range of 2.5–6.0 μm, a region that overlaps with multiple characteristic gas absorption lines and therefore enables gas detection applications. A test station integrating a mid-IR tunable laser, a microgas delivery system, and a mid-IR camera was assembled to evaluate the gas detection performance. CH4, CO2, and N2O were selected as analytes due to their strong absorption bands at λ = 3.25–3.50, 4.20–4.35, and 4.40–4.65 μm, which correspond to C–H, C–O, and O–N stretching, respectively. A short subsecond response time and high gas identification accuracy were achieved. Therefore, our chip-scale mid-IR sensor provides a new platform for an in situ, remote, and embedded gas monitoring system.
中文翻译：
使用中红外膜微腔的实时气体混合物分析
使用中红外（mid-IR）微腔演示了片上实时气体分析。用于微腔的光学孔是使用互补金属氧化物半导体（CMOS）工艺由嵌入硅芯片中的超薄硅酸盐膜制成的。傅里叶变换红外光谱（FTIR）表明，硅酸盐膜在2.5–6.0μm的范围内是透明的，该区域与多个特征气体吸收线重叠，因此可以进行气体检测应用。组装了一个集成了中红外可调激光器，微气体传输系统和中红外摄像机的测试站，以评估气体检测性能。CH 4，CO 2和N 2选择O作为分析物是因为它们在λ= 3.25–3.50、4.20–4.35和4.40–4.65μm处具有很强的吸收带，分别对应于C–H，C–O和O–N拉伸。响应时间短，气体识别精度高。因此，我们的芯片级中红外传感器为现场，远程和嵌入式气体监测系统提供了一个新平台。
更新日期：2018-03-06
中文翻译：
使用中红外膜微腔的实时气体混合物分析
使用中红外（mid-IR）微腔演示了片上实时气体分析。用于微腔的光学孔是使用互补金属氧化物半导体（CMOS）工艺由嵌入硅芯片中的超薄硅酸盐膜制成的。傅里叶变换红外光谱（FTIR）表明，硅酸盐膜在2.5–6.0μm的范围内是透明的，该区域与多个特征气体吸收线重叠，因此可以进行气体检测应用。组装了一个集成了中红外可调激光器，微气体传输系统和中红外摄像机的测试站，以评估气体检测性能。CH 4，CO 2和N 2选择O作为分析物是因为它们在λ= 3.25–3.50、4.20–4.35和4.40–4.65μm处具有很强的吸收带，分别对应于C–H，C–O和O–N拉伸。响应时间短，气体识别精度高。因此，我们的芯片级中红外传感器为现场，远程和嵌入式气体监测系统提供了一个新平台。
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