A Highly Sensitive Flexible Capacitive Tactile Sensor with Sparse and High‐Aspect‐Ratio Microstructures,Advanced Electronic Materials

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A Highly Sensitive Flexible Capacitive Tactile Sensor with Sparse and High‐Aspect‐Ratio Microstructures
Advanced Electronic Materials ( IF 5.3 ) Pub Date : 2018-03-01 , DOI: 10.1002/aelm.201700586
Yongbiao Wan _{1,

2} , Zhiguang Qiu ₁ , Ying Hong _{1,

2} , Yan Wang _{1,

2} , Jianming Zhang ₁ , Qingxian Liu ₁ , Zhigang Wu _{1,

3} , Chuan Fei Guo ₁

Affiliation

Highly sensitive flexible tactile sensors that can be fabricated in a low cost and efficient way are in great demand for intelligent soft robotics and friendly human–machine interaction. Herein, a highly sensitive flexible tactile sensor is developed by using bionic micropatterned polydimethylsiloxane (m‐PDMS) replicated from lotus leaf. The m‐PDMS substrate consists of high‐aspect‐ratio and low‐density microtowers, and is covered by ultrathin silver nanowires as a bottom electrode. The capacitive sensing device is constructed by sandwiching the bottom electrode, a colorless polyimides dielectric layer, and a top electrode, and exhibits a high sensitivity of ≈1.2 k Pa⁻¹, a ultralow limit of detection <0.8 Pa, and a fast response time of 36 ms. The finite‐elemental analysis indicates that the sparse and high‐aspect‐ratio microtowers are critical to achieve high sensitivity, low limit of detection, and fast response to external stimulus. The flexible tactile sensor also exhibits high robustness: it can be tested for at least 100 000 cycles without showing fatigue. More importantly, the flexible tactile sensors are potentially useful in intelligent soft robots, health monitoring, and motion detection. Besides, the fabrication strategy may offer a guideline to design other microstructures for improving the performance of flexible tactile sensors.

中文翻译：

具有稀疏和高纵横比微结构的高灵敏度柔性电容式触觉传感器

能够以低成本和高效率的方式制造的高度灵敏的柔性触觉传感器，对智能软机器人和友好的人机交互有着巨大的需求。在本文中，通过使用从荷叶复制的仿生微图案化聚二甲基硅氧烷（m-PDMS）开发了一种高灵敏度的柔性触觉传感器。m-PDMS基板由高纵横比和低密度的微型塔组成，并被超薄银纳米线覆盖作为底部电极。电容式感应设备通过将底部电极，无色聚酰亚胺介电层和顶部电极夹在中间而构成，并具有≈1.2k Pa ^-1的高灵敏度，<0.8 Pa的超低检测限和36 ms的快速响应时间。有限元分析表明，稀疏和高纵横比的微型塔对于实现高灵敏度，低检测限和对外部刺激的快速响应至关重要。柔性触觉传感器还具有很高的耐用性：可以进行至少10万次循环测试而不会出现疲劳。更重要的是，柔性触觉传感器可能在智能软机器人，健康监控和运动检测中很有用。此外，制造策略可以为设计其他微结构以提高柔性触觉传感器的性能提供指导。

更新日期：2018-03-01

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