A macro–micro composite precision positioning stage is mainly used in microelectronics manufacturing to achieve high-velocity and high-precision positioning. The residual vibration caused by high-speed macromotion will prolong the settling time and influence the working efficiency. This paper proposes a rapid dynamic positioning (RDP) method to quickly reduce the settling time of a macro–micro positioning stage by employing a designed spring-piezoelectric microstage. The main points of the RDP method are that it can start up the microstage at appropriate moment with proper extension to work against the macromotion vibration. Once the stage vibration amplitude is reduced to the piezoelectric element stroke limit, the micromotion is actuated to approach its final position. In this study, the start-up conditions and extension amount of the piezoelectric element were determined for implementing the RDP method. The feasibility of the method was clarified through theoretical analysis, including dynamic modeling, natural frequency analysis, and a vibration reduction and error compensation analysis. The experimental work was carried out, and the results validated the effectiveness of the RDP method in settling time reduction at different movements. With the assistance of the RDP method, the macro–micro high-speed, large-stroke stage can achieve an effective settling time reduction without sacrificing its accuracy.

中文翻译：

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一种通过具有高定位精度的宏观-微观复合平台缩短稳定时间的快速动态定位方法

宏微复合精密定位平台主要用于微电子制造，实现高速高精度定位。高速宏观运动引起的残余振动会延长稳定时间，影响工作效率。本文提出了一种快速动态定位 (RDP) 方法，通过采用设计的弹簧压电微型平台来快速减少宏微观定位平台的稳定时间。RDP方法的要点是它可以在适当的时刻启动微台，适当的伸展来对抗宏观运动的振动。一旦平台振动幅度减小到压电元件行程极限，就会启动微动以接近其最终位置。在这项研究中，确定压电元件的启动条件和伸出量以实施 RDP 方法。通过理论分析，包括动态建模、固有频率分析、减振和误差补偿分析，阐明了该方法的可行性。进行了实验工作，结果验证了 RDP 方法在减少不同运动下的稳定时间方面的有效性。在 RDP 方法的帮助下，宏观-微观高速、大行程阶段可以在不牺牲其精度的情况下实现有效的稳定时间减少。以及减振和误差补偿分析。进行了实验工作，结果验证了 RDP 方法在减少不同运动下的稳定时间方面的有效性。在 RDP 方法的帮助下，宏观-微观高速、大行程阶段可以在不牺牲其精度的情况下实现有效的稳定时间减少。以及减振和误差补偿分析。进行了实验工作，结果验证了 RDP 方法在减少不同运动下的稳定时间方面的有效性。在 RDP 方法的帮助下，宏观-微观高速、大行程阶段可以在不牺牲其精度的情况下实现有效的稳定时间减少。