Abstract In this paper, novel micro- and nano-composite Al-doped ZnO (AZO) films with broadband-gap light-trapping capacity was successfully fabricated by post-chemical-etching AZO film and re-sputtering self-textured H and Al co-doped ZnO (HAZO) film. The influence of pressure and etching time on the optical and electrical properties of HAZO, AZO, and AZO/HAZO films were systematically investigated. The performance of this novel ZnO film was increased remarkably compared to that of the post-etched AZO film or native textured HAZO film for both long and short wavelengths. Microcrystalline silicon solar cells deposited on this new type of AZO/HAZO films exhibited a strong enhancement of 13.4% in the conversion efficiency, demonstrating its wide application prospect.

中文翻译：

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用于Si薄膜太阳能电池的AZO薄膜的光捕获能力管理-通过定制表面纹理

摘要 在本文中，通过后化学蚀刻 AZO 薄膜和再溅射自织构的 H 和 Al co 成功制备了具有宽带隙光捕获能力的新型微米和纳米复合 Al 掺杂 ZnO (AZO) 薄膜。掺杂的 ZnO (HAZO) 薄膜。系统地研究了压力和蚀刻时间对HAZO、AZO和AZO/HAZO薄膜的光学和电学性能的影响。与蚀刻后的 AZO 膜或自然织构的 HAZO 膜相比，这种新型 ZnO 膜的性能在长波长和短波长都有显着提高。沉积在这种新型 AZO/HAZO 薄膜上的微晶硅太阳能电池的转换效率提高了 13.4%，显示出其广泛的应用前景。