Large‐Scale Fabrication of Shaped High Index Dielectric Nanoparticles on a Substrate and in Solution,Advanced Optical Materials

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Large‐Scale Fabrication of Shaped High Index Dielectric Nanoparticles on a Substrate and in Solution
Advanced Optical Materials ( IF 8.0 ) Pub Date : 2018-02-06 , DOI: 10.1002/adom.201701253
Ruggero Verre ₁ , Nils Odebo Länk ₁ , Daniel Andrén ₁ , Hana Šípová ₁ , Mikael Käll ₁

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High index dielectric nanoparticles and metasurfaces have been proposed for many different applications, including light harvesting, sensing, and metalenses. However, widespread utilization in practice also requires large‐scale fabrication methods able to produce homogeneous structures with engineered optical properties in a cost effective manner. Here, a facile fabrication method for silicon nanoparticles is presented that is scalable to 4 inch wafers and can produce a wide range of nanoparticle shapes on demand. Furthermore, it is shown that the fabricated nanoparticles can be detached from their support using a simple substrate removal technique and then transferred to colloidal suspension. The method is universal in the sense that it can be used to generate monodispersed colloidal solutions of nanoparticles of various shapes, sizes and compositions and it therefore opens up a range of new possibilities for applications, for example in nanomedicine and bionanotechnology.

中文翻译：

在基材上和溶液中大规模制备高形介电纳米颗粒

已经提出了用于许多不同应用的高折射率电介质纳米粒子和超表面，包括光收集，感测和金属感。但是，在实践中广泛使用还需要能够以经济有效的方式生产具有工程光学性能的均质结构的大规模制造方法。在此，提出了一种用于硅纳米粒子的简便制造方法，该方法可扩展至4英寸晶圆，并可根据需要生产多种纳米粒子形状。此外，显示了可以使用简单的底物去除技术将所制备的纳米颗粒从其载体上分离，然后转移至胶体悬浮液中。从可以用于生成各种形状的纳米粒子的单分散胶体溶液的意义上说，该方法是通用的，

更新日期：2018-02-06

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