Photoelectrocatalytic effect of unbalanced RF magnetron sputtered TiO2 thin film on ITO-coated patterned SiO2 nanocone arrays†,Catalysis Science & Technology

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Photoelectrocatalytic effect of unbalanced RF magnetron sputtered TiO2 thin film on ITO-coated patterned SiO2 nanocone arrays†
Catalysis Science & Technology ( IF 4.4 ) Pub Date : 2018-01-12 00:00:00 , DOI: 10.1039/c7cy02371e
Gyu Jin Choi _{1,

2,

3,

4} , Hyemin Jung _{1,

2,

3,

4} , Dong Ho Kim _{1,

2,

3,

4} , Youngku Sohn _{4,

5,

6,

7} , Jin Seog Gwag _{1,

2,

3,

4}

Affiliation

TiO₂ has displayed potential for improved catalytic activity using a newly designed morphological system. Herein, a new catalytic system of SiO₂/ITO/TiO₂ nanocone array structures with unbalanced RF sputtering deposition was developed and demonstrated for photoelectrocatalytic activity. The array structures were fabricated using a soft nanolithography technique with a SiO₂ sphere-patterned polydimethylsiloxane stamp. TiO₂ films were coated on the ITO-coated SiO₂ nanocones using unbalanced RF magnetron sputtering with various external magnetic fields applied by a solenoid. The nanostructures were examined using scanning electron microscopy, high-resolution transmission electron microscopy, X-ray diffraction crystallography, and X-ray photoelectron spectroscopy. The photocurrent response in water splitting was found to be increased by 400% for TiO₂ films on nano-patterned arrays, compared with that on a flat surface. An additional increase in photocatalytic activity was achieved via TiO₂ film deposition with an external magnetic field of 6 mT. This dramatic enhancement was attributed to the surface active sites created by the additional applied magnetic field and the increased surface area of the nanocone arrays.

中文翻译：

射频不平衡的磁控溅射TiO ₂薄膜在ITO涂层图案化SiO ₂纳米锥阵列上的光电催化效果†

TiO ₂具有使用新设计的形态学系统改善催化活性的潜力。在此，开发了具有不平衡RF溅射沉积的SiO ₂ / ITO / TiO ₂纳米锥阵列结构的新催化体系，并证明了其光电催化活性。使用具有SiO ₂球形图案化的聚二甲基硅氧烷印模的软纳米光刻技术来制造阵列结构。将TiO ₂薄膜涂覆在ITO涂覆的SiO _2上纳米锥使用不平衡的射频磁控溅射，并通过螺线管施加各种外部磁场。使用扫描电子显微镜，高分辨率透射电子显微镜，X射线衍射晶体学和X射线光电子能谱检查纳米结构。发现在纳米图案阵列上的TiO ₂薄膜与在平坦表面上相比，在水分解中的光电流响应增加了400％。通过在外部磁场为6 mT的TiO ₂膜上沉积，可以进一步提高光催化活性。这种显着增强归因于额外施加的磁场和纳米锥阵列表面积增加所产生的表面活性位。

更新日期：2018-01-12

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