Despite the demands of growth, the development of deep-ultraviolet (UV) light-emitting diodes (LEDs) still suffers from the fundamental limits of material defects and the anisotropic optical property of AlGaN multiple quantum-wells (MQWs), resulting in an extremely low emission output. Here, we present a novel approach to address this issue by using a nanoscale hyperbolic metacavity on the deep-UV LED, where the resonant modes of metacavity are excited. An intense plasmon field is consequently feedback to the MQW. This strong resonant mode feedback allows the dipoles of MQW recombine directionally, thereby achieving enhancements of radiative emission rate by a factor of 160 and quantum efficiency by a factor of 3.5. It also shows the capability of metacavity in tailoring the direction of light emission, leading to a 520% increase in total emission intensity and 148% increase in emission extraction. A small divergence angle of 65° of LEDs is therefore demonstrated. Our study clearly shows that the use of metacavity is a promising candidate for the highly-desired efficiency and directivity deep-UV applications, and the metacavity effect can be extended to other nanoscale devices, such as nanolaser, single photon source, nano-biosensor, and nano-antenna.

尽管有增长的需求，但深紫外（UV）发光二极管（LED）的发展仍然受到材料缺陷和AlGaN多量子阱（MQW）各向异性光学性质的基本限制，从而产生了极其严重的缺陷。低排放量。在这里，我们提出了一种新颖的方法来解决这个问题，方法是在深紫外LED上使用纳米级双曲线超腔，激发超腔的共振模式。因此，强烈的等离激元场将反馈到MQW。这种强大的共振模式反馈使MQW的偶极子定向重组，从而使辐射发射率提高了160倍，量子效率提高了3.5倍。它还显示了超腔在调整发光方向方面的能力，导致总排放强度增加520％，排放提取增加148％。因此，LED的发散角很小，为65°。我们的研究清楚地表明，对于高度期望的效率和方向性深紫外应用，使用超腔是有希望的选择，并且超腔效应可以扩展到其他纳米级设备，例如纳米激光，单光子源，纳米生物传感器，和纳米天线。