Abstract With the rapid development of the photovoltaic industry, pressurized Siemens belljar-type polysilicon CVD reactors have been enlarged from 24 rods to 96 rods in less than 10 years aimed at much greater single-reactor productivity. A CFD model of an industry-scale 96-rod CVD reactor was established to study the internal temperature distribution and the flow field of the reactor. Numerical simulations were carried out and compared with actual growth results from a real CVD reactor. Factors affecting polysilicon depositions such as inlet gas injections, flow field, and temperature distribution in the CVD reactor are studied.

中文翻译：

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48对棒多晶硅还原炉数值模拟

摘要 随着光伏产业的快速发展，西门子加压钟罩式多晶硅CVD反应器在不到10年的时间里从24棒扩大到96棒，旨在提高单反应器的生产率。建立工业规模96杆CVD反应器的CFD模型，研究反应器内部温度分布和流场。进行了数值模拟，并与来自真实 CVD 反应器的实际生长结果进行了比较。研究了影响多晶硅沉积的因素，例如入口气体注入、流场和 CVD 反应器中的温度分布。