Mechanically flexible photonic devices are essential building blocks for novel bio-integrated optoelectronic systems, wearable sensors, and flexible consumer electronics. Here we describe the design and experimental demonstration of high-performance flexible semiconductor nanomembrane photodetectors integrated with single-mode chalcogenide glass waveguides. Through a combination of a waveguide-integrated architecture to enhance light–matter interactions and mechanical engineering of multilayer configurations to suppress strains, the detector devices exhibit record optical and mechanical performance. The devices feature a noise equivalent power as low as $0.02\mathrm{pW}·{\mathrm{Hz}}^{1/2}$, a linear dynamic range exceeding 70 dB, and a 3-dB bandwidth of 1.4 GHz, all measured at 1530 nm wavelength. The devices withstand 1000 bending cycles at a submillimeter radius without degradation in their optoelectronic responses. These metrics represent significant improvements over state-of-the-art flexible photodetectors.

中文翻译：

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高性能柔性波导集成光电探测器

机械柔性的光子器件是新型生物集成光电系统，可穿戴传感器和柔性消费电子产品的重要组成部分。在这里，我们描述了集成有单模硫属化物玻璃波导的高性能柔性半导体纳米膜光电探测器的设计和实验演示。通过结合使用波导集成的体系结构来增强光与物质的相互作用以及采用多层结构的机械工程来抑制应变，检测器设备展现了创纪录的光学和机械性能。这些器件的噪声等效功率低至$0.02\mathrm{功率}·{\mathrm{赫兹}}^{\mathrm{1个}/\mathrm{2个}}$，超过70 dB的线性动态范围和1.4 GHz的3 dB带宽，均在1530 nm波长下测量。这些设备在亚毫米半径下可以承受1000次弯曲循环，而不会降低其光电响应。这些指标代表了对最新型柔性光电探测器的重大改进。