High fill‐factor microlens arrays (MLA) are key for improving photon collection efficiency in light‐sensitive devices. Although several techniques are now capable of producing high‐quality MLA, they can be limited in fill‐factor, precision, the range of suitable substrates, or the possibility to generate arbitrary arrays. Here, a novel additive direct‐write method for rapid and customized fabrication of high fill‐factor MLA over a variety of substrates is demonstrated. This approach uses a single laser pulse to delaminate and catapult a polymeric microdisc from a film onto a substrate of interest. Following a thermal reflow process, the printed disc can be converted into a planoconvex microlens offering excellent sphericity and high smoothness (R_RMS < 40 Å). Importantly, the transfer of solid microdiscs enables fill‐factors close to 100%, not achievable with standard direct‐write methods such as inkjet printing or microdispensing. Arbitrary generation of MLA over flexible and curved surfaces, with microlenses presenting a curvature ranging from 20 to 240 µm and diffraction‐limited performance, is demonstrated. The ease of implementation and versatility of the approach, combined with its potential parallelization, paves the way for the high‐throughput fabrication of tailored MLA directly on top of functional devices.

中文翻译：

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高填充因子微透镜阵列的单次激光增材制造

高填充因数微透镜阵列（MLA）是提高光敏设备中光子收集效率的关键。尽管现在有几种技术可以产生高质量的MLA，但它们在填充因子，精度，合适基板的范围或生成任意阵列的可能性方面受到限制。在这里，展示了一种新颖的添加剂直接写入方法，该方法可以在各种基材上快速且定制地制造高填充因子MLA。该方法使用单个激光脉冲将聚合物微盘从膜上分层并弹射到目标基材上。经过热回流工艺后，可以将打印的光盘转换为平凸微透镜，从而提供出色的球形度和高平滑度（R _RMS）<40Å）。重要的是，固体微盘的转移使填充率接近100％，这是标准的直接写入方法（如喷墨打印或微点胶）无法实现的。演示了在柔性和弯曲表面上任意生成MLA的情况，其中微透镜的曲率范围为20到240 µm，并且具有衍射极限性能。该方法易于实施且具有多功能性，再加上其潜在的并行性，为直接在功能设备之上的定制MLA的高通量制造铺平了道路。