In the field of automobiles and many other industries, there is an urgent demand for the sensing of high-g acceleration. In this paper, a self-powered high-g acceleration sensor based on a triboelectric nanogenerator is proposed for the first time. It is micro-fabricated with a total volume of $14\times 14\times 8{\mathrm{mm}}^3$, and its sensing ability is confirmed via a Machete hammer experiment, with a measurement range of up to $1.8\times {10}^{4}g$, a sensitivity of 1.8 mV/g, and a Pearson correlation coefficient of 0.99959. In addition, the output signal of this novel acceleration sensor has few clutters, which is beneficial for recognition and subsequent signal processing. The effects of the aluminum-electrode thickness on the sensitivity and linearity of the sensor are investigated via modeling, theoretical analysis, and experiment, providing a reliable basis for the parameter optimization of the structural design. Experiment results indicate that this novel acceleration sensor covers a wide measurement range and meets the urgent needs of monitoring various high-g impacts for military equipment and automobiles.

在汽车等众多行业领域，有一个高的感应迫切需求摹加速。本文首次提出了一种基于摩擦纳米发电机的自供电式高g加速度传感器。它是微型制造的，总体积为$14\times 14\times 8{\mathrm{毫米}}^3$，其感应能力已通过大砍刀锤击实验得到证实，测量范围最大为 $1.8\times {10}^{4}G$，灵敏度为1.8 mV / g，皮尔森相关系数为0.99959。另外，这种新颖的加速度传感器的输出信号具有很少的混乱，这对于识别和随后的信号处理是有益的。通过建模，理论分析和实验研究了铝电极厚度对传感器灵敏度和线性的影响，为结构设计的参数优化提供了可靠的依据。实验结果表明，这种新型加速度传感器涵盖了广泛的测量范围，满足了监视军事设备和汽车的各种高g冲击的紧迫需求。