Transfer of Individual Micro‐ and Nanoparticles for High‐Precision 3D Analysis Using 360° Electron Tomography,Small Methods

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Transfer of Individual Micro‐ and Nanoparticles for High‐Precision 3D Analysis Using 360° Electron Tomography
Small Methods ( IF 10.7 ) Pub Date : 2017-12-04 , DOI: 10.1002/smtd.201700276
Thomas Przybilla ₁ , Benjamin Apeleo Zubiri ₁ , Ana M. Beltrán ₁ , Benjamin Butz ₁ , Albert G. F. Machoke ₂ , Alexandra Inayat ₂ , Monica Distaso _{3,

4} , Wolfgang Peukert _{3,

4} , Wilhelm Schwieger _{2,

4} , Erdmann Spiecker _{1,

4}

Affiliation

A versatile approach is demonstrated, providing a general routine for an extensive and advanced 3D characterization of individually selected micro‐ and nanoparticles, enabling the combination of complementary and scale‐bridging techniques. Quintessential to the method is the transfer of individual particles onto tailored tips using a conventional scanning electron microscope equipped with a suitable micromanipulator. The method enables a damage‐ and contamination‐free preparation of freestanding particles. This is of significant importance for applications addressing the measurement of structural, physical, and chemical properties of specifically selected particles, such as 360° electron tomography, atom probe tomography, nano X‐ray tomography, or optical near‐field measurements. In this context, the method is demonstrated for 360° electron tomography of micro‐/macroporous zeolite particles with sizes in the micrometer range and mesoporous alpha‐hematite nanoparticles exhibiting sizes of 50–100 nm, including detailed pre‐ and post‐characterization on the nanoscale.

中文翻译：

使用360°电子断层扫描进行单个微粒和纳米颗粒的转移以进行高精度3D分析

演示了一种通用方法，该方法可为单独选择的微粒和纳米颗粒进行广泛而高级的3D表征提供通用程序，从而能够将互补技术和比例桥接技术相结合。该方法的典型代表是使用配备有合适微操纵器的常规扫描电子显微镜将单个颗粒转移到定制的尖端上。该方法可实现无损伤和无污染的独立颗粒的制备。这对于解决特定选定颗粒的结构，物理和化学性质测量的应用至关重要，例如360°电子断层扫描，原子探针断层扫描，纳米X射线断层扫描或光学近场测量。在这种情况下，

更新日期：2017-12-04

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