Investigations of temperature and power effects on Cu(In,Ga)Se2 thin‐film formation during a 3‐stage hybrid co‐sputtering/evaporation process,Progress in Photovoltaics

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Investigations of temperature and power effects on Cu(In,Ga)Se2 thin‐film formation during a 3‐stage hybrid co‐sputtering/evaporation process
Progress in Photovoltaics ( IF 8.0 ) Pub Date : 2017-09-05 , DOI: 10.1002/pip.2926
Jorge Posada _{1,

2} , Marie Jubault _{1,

2} , Angélique Bousquet _{3,

4} , Eric Tomasella _{3,

4} , Daniel Lincot _{2,

5}

Affiliation

This work explores a strategy to bring together the advantages of co‐evaporation and sputtering by developing a hybrid co‐sputtering/evaporation process, where copper, indium, and gallium are sputtered with the thermal evaporation of selenium. A 3‐stage hybrid co‐sputtering/evaporation process for Cu(In,Ga)Se₂ (CIGS) thin films solar cells has been developed by controlling the deposition parameters (temperature, sputtering power, and evaporation). (In,Ga)₂Se₃ layers are deposited in the first stage, followed by Cu_2 − xSe and Cu_2 − xSe/(In,Ga)₂Se₃ layers. Material properties at different steps were studied in detail by X‐ray fluorescence, energy dispersive X‐ray, scanning electron microscopy, glow discharge optical emission spectroscopy, Raman spectroscopy, and X‐ray diffraction. Solar cells were completed leading to 9.7% efficiency.

中文翻译：

在三阶段混合共溅射/蒸发过程中温度和功率对Cu（In，Ga）Se2薄膜形成的影响的研究

这项工作探索了一种策略，通过开发混合共溅射/蒸发工艺，将铜，铟和镓随硒的热蒸发一起溅射，从而将共蒸发和溅射的优点结合在一起。通过控制沉积参数（温度，溅射功率和蒸发），已开发出用于Cu（In，Ga）Se ₂（CIGS）薄膜太阳能电池的三阶段混合共溅射/蒸发工艺。在第一阶段中沉积（In，Ga）₂ Se ₃层，然后沉积Cu _2-x Se和Cu _2-x Se /（In，Ga）₂ Se ₃层。通过X射线荧光，能量色散X射线，扫描电子显微镜，辉光放电光发射光谱，拉曼光谱和X射线衍射详细研究了不同步骤的材料性能。太阳能电池完成后，效率提高了9.7％。

更新日期：2017-09-05

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