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Determination of the maximum thickness for directed self-assembly of cylinder-forming PS-b-PMMA films on chemical patterns
Molecular Systems Design & Engineering ( IF 3.2 ) Pub Date : 2017-12-05 00:00:00 , DOI: 10.1039/c7me00101k Yadong Liu 1, 2, 3, 4, 5 , Shengxiang Ji 1, 2, 3, 4, 5
Molecular Systems Design & Engineering ( IF 3.2 ) Pub Date : 2017-12-05 00:00:00 , DOI: 10.1039/c7me00101k Yadong Liu 1, 2, 3, 4, 5 , Shengxiang Ji 1, 2, 3, 4, 5
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Previous studies on directed self-assembly (DSA) of cylinder-forming PS-b-PMMA mainly use films with a thickness comparable to the natural period of the block copolymer, Lo. It is unclear how thick the cylinder-forming PS-b-PMMA film can be directed to assemble on chemical patterns. In this work, a feasible approach is developed to determine the maximum thickness for DSA of cylinder-forming PS-b-PMMA films. The chemical pattern with a controlled correlation length (ξ) is fabricated by molecular transfer printing (MTP) by replicating the surface domain pattern of the template blend film and used to direct the self-assembly of the same blend film. The transition from substrate-controlled DSA to surface-controlled self-assembly is located in assembled films on MTP replica patterns with the thickness between 4.9Lo and 5.7Lo by comparing the ξ of the assembled film with the ξ of the original template. DSA of cylinder-forming PS-b-PMMA is achieved in films with thickness up to at least 4.9Lo. When the film is thicker than 5.7Lo, the substrate and surface effects decouple and the free surface controls the film surface morphology.
中文翻译：
确定化学图案上的圆柱状PS- b -PMMA薄膜 定向自组装的最大厚度
先前关于圆筒形PS- b - PMMA的定向自组装（DSA）的研究主要使用厚度与嵌段共聚物L o的自然周期相当的膜。尚不清楚可引导圆柱形的PS- b -PMMA膜厚到如何组装成化学图案。在这项工作中，开发了一种可行的方法来确定圆柱状PS- b - PMMA膜的DSA的最大厚度。相关长度受控的化学模式（ξ）是通过分子转移印刷（MTP）通过复制模板共混膜的表面域图案制成的，并用于指导同一共混膜的自组装。从衬底控制的DSA于过渡表面控制自组装位于上MTP复制品图案组装膜用4.9之间的厚度大号Ò和5.7大号Ó由比较ξ组装膜的与ξ原始模板的。在厚度至少为4.9 L o的薄膜中实现了圆柱形成PS- b -PMMA的DSA 。当膜厚超过5.7 L o，基材和表面效应解耦，自由表面控制薄膜表面形态。
更新日期：2017-12-05
中文翻译：
确定化学图案上的圆柱状PS- b -PMMA薄膜 定向自组装的最大厚度
先前关于圆筒形PS- b - PMMA的定向自组装（DSA）的研究主要使用厚度与嵌段共聚物L o的自然周期相当的膜。尚不清楚可引导圆柱形的PS- b -PMMA膜厚到如何组装成化学图案。在这项工作中，开发了一种可行的方法来确定圆柱状PS- b - PMMA膜的DSA的最大厚度。相关长度受控的化学模式（ξ）是通过分子转移印刷（MTP）通过复制模板共混膜的表面域图案制成的，并用于指导同一共混膜的自组装。从衬底控制的DSA于过渡表面控制自组装位于上MTP复制品图案组装膜用4.9之间的厚度大号Ò和5.7大号Ó由比较ξ组装膜的与ξ原始模板的。在厚度至少为4.9 L o的薄膜中实现了圆柱形成PS- b -PMMA的DSA 。当膜厚超过5.7 L o，基材和表面效应解耦，自由表面控制薄膜表面形态。
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