Ferroelectret Nanogenerators (FENG) devices were introduced recently as promising flexible devices for energy harvesting and microphone/loud-speaker applications. Vanadium dioxide (VO₂) thin films, on the other hand, have been demonstrated to enable large frequency tunability of miniaturized electro-mechanical structures, which are commonly integrated in transceiver and communication systems. In this work, we integrate these two technologies, to show a system where an electric pulse, supplied by the FENG can be used to tune the resonant frequency of VO₂-based micro-electro-mechanical structures. Furthermore, due to the VO₂'s hysteretic behavior, the applied pulse also programs the tuned frequency, allowing for different frequency states in the device for a single applied DC bias. It is found that the tuning of the frequency states is determined by the supplied energy, and the programming is more efficient for larger, shorter pulses –even if the duration of the pulse is shorter than the system's thermal time constant. We explore two different mechanical structures, bridge and cantilever. A wider tuning range is found for the bridge structure (22%), which is due to the larger frequency sensitivity with stress for this configuration. The tuning/programming action uses harvested mechanical energy, which could come from the user. The potential use of the developed system as an accelerometer or impact sensor for monitoring brain injuries in contact-sports is discussed.

铁电驻极体纳米发电机（FENG）设备是最近推出的，它是用于能量收集和麦克风/扬声器应用的有前途的柔性设备。另一方面，已经证明二氧化钒（VO ₂）薄膜能够实现小型化的机电结构的大频率可调谐性，该机电结构通常集成在收发器和通信系统中。在这项工作中，我们将这两种技术集成在一起，展示了一个系统，其中可以使用由FENG提供的电脉冲来调整基于VO ₂的微机电结构的共振频率。此外，由于VO ₂由于具有磁滞特性，所施加的脉冲还可以对调谐频率进行编程，从而允许在单个施加的DC偏置下器件中的不同频率状态。可以发现，频率状态的调谐取决于所提供的能量，并且即使脉冲持续时间短于系统的热时间常数，对于较大，较短的脉冲，编程也更有效。我们探索了两种不同的机械结构，桥梁和悬臂。桥结构的调谐范围更广（22％），这是由于此配置具有更大的频率灵敏度和应力。调整/编程操作使用了可能来自用户的收获的机械能。