Energy harvesting is a key technology for the self-powered mode of wireless sensor nods and mobile terminals. A large number of devices have been developed to convert mechanical energy into electrical energy. Whereas great efforts have been made to improve the output performance, problems like energy dissipation, device life and response range still need to be addressed. Herein, we report a hybridized triboelectric-piezoelectric-electromagnetic nanogenerator efficiently harvesting vibration energy. Three harvest modes are integrated into a single device, whose core component is a magnetic levitation structure. On the one hand, it presents higher sensitivity than conventional spring or cantilever designs due to low energy loss, which favors the tiny energy harvesting like the slapping desk vibration and the running car vibration. On the other hand, the mechanical fatigue or damage can be avoided by the special structure design. Under 20 Hz, triboelectric nanogenerator (TENG) can deliver a peak output power of 78.4 μW, while the top (EMG2) and the bottom (EMG1) electromagnetic generator can provide a peak output power of 36 mW and 38.4 mW, respectively. Piezoelectric generator located at top (PEG2) and bottom (PEG1) can contribute a peak output power of 122 mW and 105 mW, respectively. The capacitor charge measurement reveals that unit combination performance is remarkably stronger than individual performance, and the combination of TENG+EMG1+EMG2+PEG1+PEG2 has the highest energy harvesting capacity. Finally, this device has been integrated into a wireless sensor system. Results show that the wireless sensor system can be activated and transmit temperature and vibration signal to control computer. This work has a vital significance to the development and application of the internet of things.

能量收集是无线传感器点头和移动终端自供电模式的一项关键技术。已经开发了许多装置来将机械能转换成电能。尽管已经做出了很大的努力来改善输出性能，但是仍然需要解决诸如功耗，设备寿命和响应范围之类的问题。在这里，我们报告了一种混合的摩擦电-压电-电磁纳米发电机，可有效地收集振动能量。三种采集模式被集成到单个设备中，其核心组件是磁悬浮结构。一方面，由于能量损耗低，与传统的弹簧或悬臂设计相比，它具有更高的灵敏度，这有利于微小的能量收集，例如拍打台子振动和行驶中的汽车振动。另一方面，通过特殊的结构设计可以避免机械疲劳或损坏。在20 Hz以下，摩擦电纳米发电机（TENG）可以提供78.4μW的峰值输出功率，而顶部（EMG2）和底部（EMG1）电磁发生器可以分别提供36 mW和38.4 mW的峰值输出功率。位于顶部（PEG2）和底部（PEG1）的压电发生器可分别贡献122 mW和105 mW的峰值输出功率。电容器电荷测量显示，单元组合性能明显强于单个性能，并且TENG + EMG1 + EMG2 + PEG1 + PEG2的组合具有最高的能量收集能力。最后，该设备已集成到无线传感器系统中。结果表明，该无线传感器系统可以被激活，并将温度和振动信号传输到控制计算机。这项工作对物联网的发展和应用具有至关重要的意义。