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Surface properties of SiO2 with and without H2O2 treatment as gate dielectrics for pentacene thin-film transistor applications
Chemical Physics Letters ( IF 2.8 ) Pub Date : 2017-11-10 , DOI: 10.1016/j.cplett.2017.11.016
Cheng-Chun Hung , Yow-Jon Lin

The effect of H2O2 treatment on the surface properties of SiO2 is studied. H2O2 treatment leads to the formation of Si(-OH)x at the SiO2 surface that serves to reduce the number of donor-like trap states, inducing the shift of the Fermi level toward the conduction band minimum. H2O2 treatment also leads to a noticeable reduction in the value of the SiO2 capacitance per unit area. The effect of SiO2 layers with H2O2 treatment on carrier transport for the pentacene/SiO2–based organic thin-film transistor (OTFT) is also studied. Experimental identification confirms that the shift of the threshold voltage towards negative gate-source voltages is due to the reduced number of donor-like trap states in SiO2 near the pentacene/SiO2 interface. The existence of a hydrogenated layer between pentacene and SiO2 leads to a change in the pentacene-SiO2 interaction, increasing the value of the carrier mobility.



中文翻译:

具有和不具有H 2 O 2处理作为并五苯薄膜晶体管应用的栅极电介质的SiO 2的表面性能

研究了H 2 O 2处理对SiO 2表面性能的影响。H 2 O 2处理导致在SiO 2表面形成Si(-OH)x,该表面用于减少施主状陷阱态的数目,从而引起费米能级向导带最小值的移动。H 2 O 2处理还导致每单位面积的SiO 2电容值明显降低。H 2 O 2处理的SiO 2层对并五苯/ SiO 2载流子传输的影响的有机薄膜晶体管(OTFT)也进行了研究。实验鉴定证实,阈值电压向负栅极-源极电压的偏移是由于并五苯/ SiO 2界面附近的SiO 2中的供体状陷阱态的数量减少。在并五苯和SiO 2之间存在氢化层导致并五苯-SiO 2相互作用的改变,从而增加了载流子迁移率的值。

更新日期:2017-11-11
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