Synthesis of poly(styrene-b-4-(tert-butyldimethylsiloxy)styrene) block copolymers and characterization of their self-assembled patterns,Molecular Systems Design & Engineering

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Synthesis of poly(styrene-b-4-(tert-butyldimethylsiloxy)styrene) block copolymers and characterization of their self-assembled patterns
Molecular Systems Design & Engineering ( IF 3.2 ) Pub Date : 2017-10-16 00:00:00 , DOI: 10.1039/c7me00085e
Yoon Hyung Hur _{1,

2,

3,

4} , Seung Won Song _{1,

2,

3,

4} , Jimmy Mays _{5,

6,

7,

8} , YongJoo Kim _{2,

3,

4,

9} , Beom-Goo Kang _{5,

6,

7,

8} , Yeon Sik Jung _{1,

2,

3,

4}

Affiliation

Directed self-assembly (DSA) of block copolymers (BCPs) is regarded as one of the alternative methods to traditional top-down lithography approaches due to its ability to form well-aligned nanostructures such as spheres, cylinders, and lamellae with controlled domain size. Despite extensive research activities in this field, the question of how the Flory–Huggins interaction parameter (χ) and polydispersity of chains affect self-assembled pattern formation remains. Here, we report the self-assembly behavior of poly(styrene-b-4-(tert-butyldimethylsiloxy)styrene) (PS-b-P4BDSS) BCP, which has an intermediate χ between those of poly(styrene-b-methyl methacrylate) (PS-b-PMMA) and poly(styrene-b-dimethylsiloxane) (PS-b-PDMS), which allows pattern formation of the BCP in a wide range of length scales induced by simple thermal annealing. We also demonstrate the effect of polydispersity on self-assembled pattern quality by comparing BCPs synthesized via anionic polymerization with those synthesized via reversible addition fragmentation chain transfer (RAFT) polymerization. The self-assembled pattern of BCPs with a narrow PDI (PDI < 1.05 via anionic polymerization) shows 38% lower line edge roughness than that of BCPs with a broad PDI (PDI > 1.15 via RAFT polymerization).

中文翻译：

聚（苯乙烯-b -4-（叔丁基二甲基甲硅烷氧基）苯乙烯）嵌段共聚物的合成及其自组装图案的表征

嵌段共聚物（BCP）的直接自组装（DSA）被认为是传统的自上而下光刻方法的替代方法之一，因为它具有形成良好排列的纳米结构的能力，如球形，圆柱体和具有受控域尺寸的薄片。尽管在该领域进行了广泛的研究活动，但弗洛里-哈金斯相互作用参数（χ）和链的多分散性如何影响自组装图案的形成仍然存在问题。在这里，我们报告了聚（苯乙烯-b -4-（叔丁基二甲基甲硅烷氧基）苯乙烯）（PS- b -P4BDSS）BCP的自组装行为，该行为在聚苯乙烯-b-甲基丙烯酸甲酯之间具有中间χ）（PS- b-PMMA）和聚（苯乙烯-b-二甲基硅氧烷）（PS- b -PDMS），可通过简单的热退火在很宽的长度范围内形成BCP的图案。通过比较通过阴离子聚合合成的BCP与通过可逆加成断裂链转移（RAFT）聚合合成的BCP，我们还证明了多分散性对自组装图案质量的影响。具有窄PDI（通过阴离子聚合的PDI <1.05 ）的BCP的自组装模式显示的线边缘粗糙度比具有宽PDI（通过RAFT聚合的PDI> 1.15 ）的BCP的线边缘粗糙度低38％。

更新日期：2017-11-01

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