Functional hydroxyl-terminated poly(styrene-r-methyl methacrylate) (P(S-r-MMA)) copolymers (RCPs) are becoming key materials to control the substrate wetting characteristics not only for the conventional polystyrene-b-poly(methyl methacrylate) (PS-b-PMMA) block copolymers (BCPs) but also for high χ BCP systems. This paper reports the thermal stability of RCPs at fixed composition as a function of molar mass and at fixed molar mass as a function of composition. Distinct and sometimes opposite dependencies were observed when the samples were analyzed in bulk, in the form of thermally untreated thin films featuring different thicknesses and in the form of brush layers after the grafting process performed at different temperatures. The overall picture of these effects is useful for optimizing the thermal processing conditions of the various steps involved in BCP-based pattern transfer technology.

中文翻译：

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对功能P（S-的热稳定性的摩尔质量和组成的效果- [R -MMA），用于纳米光刻应用无规共聚物†

官能羟基封端的聚（苯乙烯- [R -甲基丙烯酸甲酯）（P（S- [R -MMA））共聚物（RCP的）正成为关键材料，以控制基板的润湿特性不仅为传统的聚苯乙烯- b -聚（甲基丙烯酸甲酯）（PS- b -PMMA）嵌段共聚物（BCP），但也适用于高χBCP系统。本文报道了RCP在固定组成下作为摩尔质量的函数和在固定摩尔质量下作为组成函数的热稳定性。当对样品进行批量分析时，观察到了不同的，有时是相反的依赖性，其形式为具有不同厚度的未经热处理的薄膜形式，以及在不同温度下进行的接枝过程后为刷层形式。这些效果的整体图对于优化基于BCP的图案转印技术中涉及的各个步骤的热处理条件很有用。