In X-ray fluorescence (XRF) analysis, which has been used to analyze elements in various samples, it is important to decrease the background (BG) intensity. Generally, BG signals are reduced by inserting metal foils of various types and thicknesses between the X-ray tube and sample as primary X-ray filters. In this study, we developed a unique gas filter-XRF (GF-XRF) instrument to easily reduce the BG effect by changing the pressure of the gas to ensure that absorption edge of gas element is slightly lower than the en-ergy of the XRF peak of the target element. The advantage of using a gas is that the gas pressure can be altered easily. To evaluate the performance of this instrument, Ti and Zr were selected as target elements, and Ar and Kr were selected as the filtering gases. When the XRF spectra of the Ti sample was recorded using the Ar gas filter, as the Ar gas pressure increased, the background signal in the energy region of the Ti Kα peak decreased, resulting in an increase in the signal-to-noise ratio (SNR) of that peak. When the Kr gas filter was used, both the SNR and the minimum detection limit of Zr were improved. These results demonstrate that the unique GF-XRF instrument is useful for high-sensitivity analyses.

中文翻译：

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新型惰性气体过滤器X射线荧光仪的研制

在用于分析各种样品中的元素的 X 射线荧光 (XRF) 分析中，降低背景 (BG) 强度非常重要。通常，通过在 X 射线管和样品之间插入各种类型和厚度的金属箔作为初级 X 射线滤波器来减少 BG 信号。在本研究中，我们开发了一种独特的气体过滤器-XRF（GF-XRF）仪器，通过改变气体的压力来轻松降低BG效应，确保气体元素的吸收边略低于XRF的能量目标元素的峰值。使用气体的优点是可以轻松改变气压。为了评价该仪器的性能，选择Ti和Zr作为目标元素，选择Ar和Kr作为过滤气体。当使用Ar气过滤器记录Ti样品的XRF光谱时，随着Ar气压的增加，Ti Kα峰能量区域的背景信号减少，导致信噪比增加（该峰值的 SNR）。当使用Kr气体过滤器时，Zr的信噪比和最低检出限均得到改善。这些结果表明，独特的 GF-XRF 仪器可用于高灵敏度分析。