Fast scanning speed and low-power consumption are becoming progressively more and more important in realizing high-performance chiplet optical phased arrays (OPAs). Here, we successfully demonstrated integrated OPAs with multiple waveguides channels based on thin-film lithium niobate-on-insulator (LNOI) platform. Specifically, two lithium niobate (LN) OPA chips have been implemented with 32 and 48 channels LN waveguides, respectively, enabled by electro-optic modulations, which showcases the low power consumption (1.11 nJ/π) and fast operation speed (14.4 ns), showing obvious advantage of the LNOI platform over others. As results, we experimentally achieved a beam steering with a 62.2° × 8.8° field of view (FOV) and a beam divergence of 2.4° × 1.2° for 32 channels, and a FOV of 40° × 8.8° and a beam divergence of 0.33° × 1.8° for 48 channels. This work also demonstrates the feasibility of LNOI platform in scalable OPA chips.

中文翻译：

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基于铌酸锂波导的高速低功耗光学相控阵

快速扫描速度和低功耗对于实现高性能小芯片光学相控阵（OPA）变得越来越重要。在这里，我们成功演示了基于薄膜绝缘体上铌酸锂 (LNOI) 平台的具有多个波导通道的集成 OPA。具体来说，两个铌酸锂 (LN) OPA 芯片分别采用 32 和 48 通道 LN 波导，通过电光调制实现，具有低功耗 (1.11 nJ/π) 和快速运行速度 (14.4 ns) ，显示出LNOI平台相对于其他平台的明显优势。结果，我们实验性地实现了32个通道的波束控制，其视场角（FOV）为62.2°×8.8°，光束发散度为2.4°×1.2°，FOV为40°×8.8°，光束发散度为48 个通道为 0.33° × 1.8°。这项工作还展示了 LNOI 平台在可扩展 OPA 芯片中的可行性。