Waveguide-based interferometric circuits are widely employed in optical communications, sensing, and computing applications. In particular, glass-based devices are appealing due to the transparency and bio-compatibility of this substrate, or where low-loss interfacing with fiber networks is required. However, fast electro-optic phase modulation is hard to achieve in glass materials. Here, we demonstrate an optical phase and intensity modulator in glass, working in the megahertz range. This modulator exploits the elasto-optic effect inside a mechanical microstructure, brought to oscillation at resonance, and is entirely realized by femtosecond laser micromachining. In detail, we demonstrate 23-dB optical intensity modulation at 1.17 MHz, with an internal optical loss of the phase-modulator component as low as 0.04 dB.

中文翻译：

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用于兆赫兹光信号调制的微光机玻璃干涉仪

基于波导的干涉电路广泛应用于光通信、传感和计算应用。特别是，由于这种基板的透明度和生物相容性，或者需要与光纤网络的低损耗接口，基于玻璃的设备非常有吸引力。然而，快速电光相位调制在玻璃材料中很难实现。在这里，我们展示了一种玻璃光学相位和强度调制器，工作在兆赫范围内。该调制器利用机械微结构内部的弹光效应，引起共振振荡，完全通过飞秒激光微加工实现。具体而言，我们演示了 1.17 MHz 下的 23 dB 光强度调制，相位调制器组件的内部光损耗低至 0.04 dB。