Atomic layer deposition (ALD) has been successfully used for the deposition of palladium (Pd) thin films and nanostructures, with a wide range of applications in fields such as microelectronics, en...

中文翻译：

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钯原子层沉积 (ALD)：从工艺到应用

原子层沉积（ALD）已成功用于钯（Pd）薄膜和纳米结构的沉积，在微电子、能源等领域具有广泛的应用。