To enhance space efficiency and reduce the planar dimensions of the piezoelectric platform, propose an innovative three-stage flexible lever hollow XY piezoelectric platform powered by piezoelectric stack. This paper details the platform's design configuration and operational principles. Analyze and optimize the platform's static and dynamic characteristics using matrix-based compliance modeling and finite element methods. The platform measures 39 mm × 39 mm × 40 mm with a hollow diameter of 29 mm × 29 mm × 40 mm and weighs 60.12 g. An array of experiments was performed to evaluate the prototype platform's performance. Experimental results revealed that the platform's motion ranges are 30.76 μm and 29.79 μm, the cross-coupling ratios are 2.02% and 2.26%, the hysteresis ratios are approximately 5.48% and 5.56%, the displacement resolution are less than 29.3 nm and 31.4 nm, and the carrying load exceeds 1 kg, all measured in the X-axis and Y-axis respectively. Moreover, after installing a simulated laser generator load, achieved square and elliptical motion trajectories by exciting different signals. The study further highlights the successful application of the novel piezoelectric positioning platform for precise motion positioning and inspection of minute electronic components under an optical microscope, signifying its potential to enhance detection and sorting processes in the electronics industry. When compared with earlier piezoelectric positioning platforms, proposed platform not only provides a superior space utilization rate but also exhibits enhanced performance. In the future, the platform will be used for high performance scanning and optical system tracking for atomic force microscopes.

为了提高空间效率并减小压电平台的平面尺寸，提出了一种由压电堆供电的创新型三级柔性杠杆空心 XY 压电平台。本文详细介绍了该平台的设计配置和运行原理。使用基于矩阵的合规性建模和有限元方法分析和优化平台的静态和动态特性。该平台尺寸为 39 mm × 39 mm × 40 mm，中空直径为 29 mm × 29 mm × 40 mm，重量为 60.12 g。进行了一系列实验来评估原型平台的性能。实验结果表明，平台运动范围分别为30.76 μm和29.79 μm，交叉耦合比分别为2.02%和2.26%，滞后比约为5.48%和5.56%，位移分辨率小于29.3 nm和31.4 nm，承载载荷超过1 kg，分别在X轴和Y轴上测量。此外，在安装模拟激光发生器负载后，通过激发不同的信号实现方形和椭圆形运动轨迹。该研究进一步突出了新型压电定位平台在光学显微镜下精确运动定位和检测微小电子元件的成功应用，表明其在增强电子行业检测和分选过程方面的潜力。与早期的压电定位平台相比，所提出的平台不仅提供了优越的空间利用率，而且表现出增强的性能。将来，