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Effect of Growth Temperature on the Structural and Morphological Properties of MgCdO Thin Films Grown by Metal Organic Chemical Vapor Deposition
Crystal Growth & Design ( IF 3.2 ) Pub Date : 2017-11-13 00:00:00 , DOI: 10.1021/acs.cgd.7b00989
Lluís M. Guia 1 , Vincent Sallet 2 , Said Hassani 2 , M. Carmen Martínez-Tomás 1 , Vicente Muñoz-Sanjosé 1
Affiliation  

II–VI oxides ternary alloys have attracted considerable interest of the scientific community due to the possibility of modulating their interesting optoelectronic properties. Despite this interest, MgCdO has been poorly studied. In this work, by using the metal organic chemical vapor deposition method at low pressure, we have analyzed the synthesis of thin films of this alloy. Thus, for a fixed metal–organic precursors content, a change from Mg1–xCdxO (Mg-rich phase) to Cd1–xMgxO (Cd-rich phase) has been induced when decreasing the growth temperature. The temperature range where both phases coexist has been particularly analyzed. Using X-ray diffraction analysis and scanning electron microscopy, a structural and morphological study of the samples has been carried out. In addition, the composition of the alloy has been measured by using energy dispersive X-ray analysis, and the behavior of the lattice parameter as a function of Cd content has been studied.

中文翻译:

生长温度对金属有机化学气相沉积法生长MgCdO薄膜结构和形貌特性的影响

II-VI氧化物三元合金由于可以调节其有趣的光电特性而引起了科学界的极大兴趣。尽管有这种兴趣,但对MgCdO的研究却很少。在这项工作中,通过在低压下使用金属有机化学气相沉积法,我们分析了该合金薄膜的合成。因此,对于固定的金属-有机前体含量,从Mg 1– x Cd x O(富Mg相)到Cd 1– x Mg x的变化降低生长温度时会诱发O(富Cd相)。已经特别分析了两相共存的温度范围。使用X射线衍射分析和扫描电子显微镜,已经对样品进行了结构和形态研究。另外,已经通过使用能量色散X射线分析来测量合金的组成,并且已经研究了晶格参数随Cd含量变化的行为。
更新日期:2017-11-14
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