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Micrometer to 15 nm Printing of Metallic Inks with Fountain Pen Nanolithography
Small ( IF 13.0 ) Pub Date : 2017-11-14 , DOI: 10.1002/smll.201702324 Talia Yeshua 1 , Michael Layani 2 , Rimma Dekhter 1 , Uwe Huebner 3 , Shlomo Magdassi 4 , Aaron Lewis 1
Small ( IF 13.0 ) Pub Date : 2017-11-14 , DOI: 10.1002/smll.201702324 Talia Yeshua 1 , Michael Layani 2 , Rimma Dekhter 1 , Uwe Huebner 3 , Shlomo Magdassi 4 , Aaron Lewis 1
Affiliation
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The field of printed electronics is continually trying to reduce the dimensions of the electrical components. Here, a method of printing metallic lines with widths as small as 15 nm and up to a few micrometers using fountain pen nanolithography (FPN) is shown. The FPN technique is based on a bent nanopipette with atomic force feedback that acts similar to a nanopen. The geometry of the nanopen allows for rapid placement accuracy of the printing tip, on any desired location, with the highest of optical sub‐micrometer resolution. Using this nanopen, investigations of various inks are undertaken together with instrumental and script‐tool development that allows accurate printing of multiple layers. This has led to the printing of conductive lines using inks composed of silver nanoparticles and salt solutions of silver and copper. In addition, it is shown that the method can be applied to substrates of various materials with minimal effect on the dimension of the line. The line widths are varied by using nanopens with different orifices or by tailoring the wetting properties of the ink on the substrate. Metallic interconnections of conducting lines are reported.
中文翻译：
微米至15 nm的钢笔纳米光刻技术印刷金属油墨
印刷电子领域一直在努力减小电子部件的尺寸。此处显示了一种使用钢笔纳米光刻（FPN）来打印宽度小至15 nm且最大到几微米的金属线的方法。FPN技术基于具有原子力反馈的弯曲纳米移液管，其作用类似于纳米笔。纳米笔的几何形状可以在任何所需的位置上以最高的光学亚微米分辨率实现打印头的快速放置精度。使用这种纳米笔，可以对各种墨水进行研究，同时还可以进行工具和脚本工具开发，从而可以准确地多层印刷。这导致使用由银纳米颗粒以及银和铜的盐溶液组成的油墨印刷导线。此外，结果表明，该方法可以应用于各种材料的基材，而对生产线的尺寸影响最小。通过使用具有不同孔口的纳米笔或通过调整墨水在基材上的润湿性来改变线宽。报告了导线的金属互连。
更新日期：2017-11-14
中文翻译：
微米至15 nm的钢笔纳米光刻技术印刷金属油墨
印刷电子领域一直在努力减小电子部件的尺寸。此处显示了一种使用钢笔纳米光刻（FPN）来打印宽度小至15 nm且最大到几微米的金属线的方法。FPN技术基于具有原子力反馈的弯曲纳米移液管，其作用类似于纳米笔。纳米笔的几何形状可以在任何所需的位置上以最高的光学亚微米分辨率实现打印头的快速放置精度。使用这种纳米笔，可以对各种墨水进行研究，同时还可以进行工具和脚本工具开发，从而可以准确地多层印刷。这导致使用由银纳米颗粒以及银和铜的盐溶液组成的油墨印刷导线。此外，结果表明，该方法可以应用于各种材料的基材，而对生产线的尺寸影响最小。通过使用具有不同孔口的纳米笔或通过调整墨水在基材上的润湿性来改变线宽。报告了导线的金属互连。
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