Abstract We demonstrate the fabrication of a polycrystalline diamond-based two-dimensional photonic crystal (PhC) slab using microsphere lithography (MSL). First, the essential issues of MSL on rough diamond surfaces are demonstrated. The peak-to-valley value of the rough surfaces is shown as the most important parameter in choosing the appropriate sphere size for the MSL technique. Second, we fabricate a diamond-based PhC composed of a hexagonal lattice of air holes and tuned to have a leaky mode in the near-infrared wavelength region at 1.31 μm which is an important telecommunication window. A monolayer of plasma-treated polystyrene microspheres with controllable size and periodicity, combined with a metal mask, are utilised as templates in the fabrication process. The prepared diamond films and photonic crystal are characterised using scanning electron microscopy, atomic force microscopy, Raman spectroscopy, reflection, and transmission measurements. In order to investigate the optical properties of the PhC, the experimental measurements are compared with simulation outputs. The successful employment of MSL on rough diamond films with their unique properties opens the road to the large scale fabrication of highly durable and chemically inert scalable structures.

中文翻译：

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用于可扩展多晶金刚石基近红外光子晶体制造的微球光刻

摘要 我们展示了使用微球光刻 (MSL) 制造基于多晶金刚石的二维光子晶体 (PhC) 板。首先，演示了粗金刚石表面上 MSL 的基本问题。粗糙表面的峰谷值是为 MSL 技术选择合适球体尺寸的最重要参数。其次，我们制造了一种由六边形气孔晶格组成的基于金刚石的 PhC，并调整为在 1.31 μm 的近红外波长区域具有泄漏模式，这是一个重要的电信窗口。尺寸和周期可控的单层等离子体处理聚苯乙烯微球与金属掩模相结合，在制造过程中用作模板。使用扫描电子显微镜、原子力显微镜、拉曼光谱、反射和透射测量对制备的金刚石薄膜和光子晶体进行表征。为了研究 PhC 的光学特性，将实验测量结果与模拟输出进行比较。将 MSL 成功应用于具有独特性能的金刚石原石薄膜，为大规模制造高度耐用和化学惰性的可扩展结构开辟了道路。