We have developed a versatile nanocalorimeter sensor which allows imaging and electrical measurements of samples under different gaseous environments using a scanning electron microscope (SEM) and can simultaneously measure the sample temperature and the associated heat of reaction. This new sensor consists of four independent heating/sensing elements for nanocalorimetry and eight electrodes for electrical measurements, all mounted on a 50 nm thick, 250 μm × 250 μm suspended silicon nitride membrane. This membrane is highly electron transparent and mechanically robust enabling in situ SEM observation under realistic temperatures, environmental conditions and pressures up to one atmosphere. To demonstrate this new capability, we report here on (1) an in situ SEM-nanocalorimetry study of melting and solidification of polyethylene oxide, (2) the temperature dependence of the conductivity of a nanowire and (3) electron beam induced current (EBIC) measurements of a nanowire under vacuum and in air. Furthermore, the sensor is easily adaptable to operate in a liquid environment and is compatible with most existing SEMs. This versatile platform couples nanocalorimetry with in situ SEM imaging under various gaseous and liquid environments and is applicable to materials research, nanotechnology, energy, catalysis and biomedical applications.

中文翻译：

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具有电触点的多环境纳米量热仪，用于扫描电子显微镜

我们已经开发了一种多功能的纳米量热仪传感器，该传感器可以使用扫描电子显微镜（SEM）在不同气体环境下对样品进行成像和电学测量，并且可以同时测量样品温度和相关的反应热。这款新型传感器由四个用于纳米量热法的独立加热/传感元件和八个用于电学测量的电极组成，它们均安装在50 nm厚，250μm×250μm的悬浮氮化硅膜上。这种膜是高度电子透明的，并且机械坚固，能够在现实的温度，环境条件和高达一个大气压的压力下进行原位SEM观察。为了展示这种新功能，我们在此处（1）进行现场报告扫描电镜-纳米量热法研究聚环氧乙烷的熔化和固化，（2）纳米线电导率的温度依赖性，以及（3）在真空和空气中纳米线的电子束感应电流（EBIC）测量。此外，该传感器很容易适应在液体环境中的操作，并且与大多数现有的SEM兼容。这个多功能平台将纳米量热法与在各种气体和液体环境下的原位SEM成像相结合，适用于材料研究，纳米技术，能源，催化和生物医学应用。