The electrostatic instability (pull-in) of a flat electrode in a parallel plate capacitor has been shown to be highly sensitive to external mechanical loads such as pressure. In this paper, we substantiate the possibility of prompting additional unstable configurations in such a system, with a remarkable sensitivity to the applied pressure. This additional instability has significant advantageous properties for sensing purposes. In addition to the high sensitivity and robustness of the pull-in voltage measurements, it can be adjusted so that after the unstable configuration is met, a snap-through to a new stable configuration occurs. As a result of this bi-stable behavior, the contact between the electrodes, which is the main drawback of pull-in phenomena, will be easily avoided. The results of this paper particularly suggest the suitability of this mechanism for two different methods of pressure measurements.

中文翻译：

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微板的双稳定性：差压测量的灵敏机制

平行板电容器中扁平电极的静电不稳定性（拉入）已被证明对外部机械负载（如压力）高度敏感。在本文中，我们证实了在这种系统中引发其他不稳定配置的可能性，对施加的压力具有显着的敏感性。这种额外的不稳定性对于传感目的具有显着的有利特性。除了引入电压测量的高灵敏度和稳健性之外，它还可以进行调整，以便在遇到不稳定的配置后，会快速通过新的稳定配置。由于这种双稳态行为，电极之间的接触是牵引现象的主要缺点，将很容易避免。